A high temperature MEMS heater for optical sensors

Abstract

Infrared light source is a key component in the optical sensing systems especially for the Fourier-Transformed Infrared (FTIR) or different kinds of gas sensor system. This paper proposes a novel method for generating a broadband wavelength infrared light source by MEMS heater based on silicon on insulator (SOI) technology. The enhanced long-tern stability has been achieved by a low electrical resistance SOI wafer. This novel MEMS heater can achieve over than 1000 °C. This MEMS heater could be integrated in micro sensing system such as metal oxide semiconductor and Non-dispersive infrared (NDIR) gas sensors.