A 300mm Si photonics platform for optical interconnection

Abstract

The Si photonics platform for 300mm SOI wafers has been built up for optical multi-applications. Main optical devices have been demonstrated. State-of-the-art propagation loss values are obtained for optical waveguides of multi-thickness SOI structures in this platform. The propagation loss is less than 0.5 dB/cm at 1.55pm wavelength for 220nm-thick waveguides. MMI coupler, AWG and WDM filter showed enough high performance for their applications. The 50×50mm2 large Si interposers using photonics electronics convergence technology have been demonstrated. These results indicate that our Si photonics platform is very useful for optical multi-applications.