On mold corner effects of EMC adhesion for IC encapsulation process

Chia-Hsun Yeh, Chen-hung Deng, Huei-Huang Lee, Sheng-Jye Hwang, D. Huang
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Abstract

In the IC packaging process, epoxy molding compound (EMC) was filling the mold cavity and cured in the mold. At the same time, adhesion may occur in the interface between the surface of mold and cured EMC. Large adhesion force could cause many problems, which may influence the ejection process. Some other critical problems may also happen in the IC molding process if adhesion problem occurs, such as distortion or crack on ejecting finished parts, residue of cured EMC on the surface of mold affecting the quality of the products, and regular, tedious and not effective mold cleaning. So how to improve the mold adhesion force effectively is an important issue for industry and research institutes. To avoid the mold adhesion problems, improving the mold design and applying suitable surface treatments such as mold surface coating are the common approaches. Among these, applying suitable surface coating is a more popular and practical approach. This study described the approach of using a semi-automatic EMC adhesion force test instrument to measure adhesion force between the mold surface and EMC and studied the corner effect during the encapsulation process. Three different cavity arcs were designed in three specimens and molded and tested during molding to observe the corner effects. Engineers could determine the best type of surface treatment and the type of corner to reduce the amount of mold adhesion force. This paper also discussed the issue of successive adhesion force test and the variation of adhesion force during successive molding test to predict the time for mold cleaning. It was found that larger corner would cause smaller adhesion force. Repeat experiments were executed and found that the test results could be repeated.
集成电路封装过程中EMC粘接的模具角效应研究
在集成电路封装过程中,环氧成型化合物(EMC)填充模腔并在模内固化。同时,模具表面与固化后的EMC之间的界面可能会发生粘连。大的附着力会导致很多问题,这可能会影响弹射过程。如果出现粘接问题,在集成电路成型过程中还可能出现一些其他的关键问题,如射出成品零件的变形或裂纹,固化后的EMC残留在模具表面影响产品质量,以及定期、繁琐而无效的模具清洗。因此,如何有效地提高模具附着力是工业和科研院所面临的一个重要问题。为了避免模具粘着问题,改进模具设计和采用合适的表面处理,如模具表面涂层是常见的方法。其中,应用合适的表面涂层是比较流行和实用的方法。本研究描述了利用半自动EMC附着力测试仪测量模具表面与EMC之间附着力的方法,并研究了封装过程中的拐角效应。在3个试件上设计了3种不同的型腔弧度,并在成型过程中进行了测试,观察角效应。工程师可以确定最佳的表面处理类型和转角类型,以减少模具附着力的大小。本文还讨论了连续粘接力测试的问题以及连续成型试验中粘接力的变化,以预测清模时间。结果表明,转角越大,附着力越小。进行了重复实验,发现试验结果可以重复。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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