A Flexible Pressure Sensor Based on Poly(dimethylsiloxane) Nanostructures Film

Abstract

This paper proposed a flexible pressure sensor based on poly(dimethylsiloxane) nanostructures film and report an efficient, simple, and low-cost fabrication strategy via soft nanoimprint lithography. The pressure sensor can convert external pressure or mechanical deformation into electrical signal to detect pressure and strain changes based on the coupling of triboelectrification and electrostatic induction. To enhance the performance of the pressure sensor, it consists of sub-500 nm resolution on the surface of elastic poly(dimethylsiloxane) sensitive layer and an indium tin oxide electrode thin film. When the pressure applied on the nanostructures layer, triboelectrostatic charges are induced. In the experiment, it measures up to sensitivity of 0.8 V/kPa at frequency of 5 Hz. This study results in potential applications such as wearable smart devices and skin-attachable diagnostics sensing systems.