Recrystallization, Electric Flame-Off Characteristics, and Electron Backscatter Diffraction of Copper Bonding Wires

F. Hung, T. Lui, Li-Hui Chen, Yi-Chang Lin
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引用次数: 7

Abstract

In the present study, the neck fracture properties of annealed wire with ¿ = 20 ¿m (0.8 mil) at 200°C ~ 300°C for 1 h and unannealed wire were compared. The microstructural characteristics, the mechanical properties and the texture transition using electron back scatter diffraction methods before and after an electric flame-off (EFO) process were also studied. Experimental results indicate that the annealing temperatures of more than 225°C, the 20 ¿m copper wires possessed a fully annealed structure, the tensile strength and the hardness decreased, and the elongation was raised. Through recrystallization, the matrix structure transferred from long, thin grains to equiaxed grains and a few annealed twins. The microstructure of the free air ball (FAB) after an EFO process consisted of column-like grains, and grew from the heat-affected zone (HAZ) to the Cu ball. For the 225°C annealed and unannealed wires, their preferred orientations on the wire and the neck were ¿100¿//AD. Under the thermal effect of EFO, the orientation of the Cu balls were mainly ¿101¿//AD and ¿111¿//AD for annealed wires. Additionally, the hardness of the Cu balls and the strength of the neck sites of the EFO wires were able to affect the reliability of the copper wire bonding.
铜键合线的再结晶、电燃特性和电子背散射衍射
本研究比较了¿= 20¿m (0.8 mil)退火丝与未退火丝在200℃~ 300℃条件下1 h的颈断裂性能。利用电子背散射衍射法研究了电燃烧过程前后的组织特征、力学性能和织构转变。实验结果表明,当退火温度超过225℃时,20 μ m铜丝具有完全退火的组织,抗拉强度和硬度下降,伸长率提高。通过再结晶,基体组织由细长晶粒转变为等轴晶粒和少量退火孪晶。EFO后的自由空气球(FAB)微观结构由柱状晶粒组成,由热影响区(HAZ)向Cu球生长。对于225°C退火和未退火的金属丝,它们在金属丝和颈上的首选方向为¿100¿//AD。在EFO的热效应下,退火钢丝的Cu球取向主要为¿101¿//AD和¿111¿//AD。此外,铜球的硬度和EFO线颈部的强度也会影响铜线结合的可靠性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
IEEE Transactions on Advanced Packaging
IEEE Transactions on Advanced Packaging 工程技术-材料科学:综合
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