Fabrication and characterization of field-effect transistors based on MoS2 nanotubes prepared in anodic aluminum oxide templates

IF 2.8 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC
Naoya Shiraiwa , Kyosuke Murata , Takuto Nakazawa , Akihiro Fukawa , Koichi Takase , Takeshi Ito , Shoso Shingubara , Tomohiro Shimizu
{"title":"Fabrication and characterization of field-effect transistors based on MoS2 nanotubes prepared in anodic aluminum oxide templates","authors":"Naoya Shiraiwa ,&nbsp;Kyosuke Murata ,&nbsp;Takuto Nakazawa ,&nbsp;Akihiro Fukawa ,&nbsp;Koichi Takase ,&nbsp;Takeshi Ito ,&nbsp;Shoso Shingubara ,&nbsp;Tomohiro Shimizu","doi":"10.1016/j.mne.2023.100200","DOIUrl":null,"url":null,"abstract":"<div><p>Field-effect transistors (FETs) based on MoS<sub>2</sub> nanotubes prepared in anodic aluminum oxide (AAO) templates have been fabricated and demonstrated in this work. MoS<sub>2</sub> nanotubes were prepared by the thermal decomposition of (NH<sub>4</sub>)<sub>2</sub>MoS<sub>4</sub> precursors in the AAO template. The diameter of the MoS<sub>2</sub> nanotubes was approximately 80 nm, which corresponded to the size of the AAO template. Schottky-type FETs were prepared with Au and Pt electrodes, and the FETs exhibited n-type behavior, with on/off ratios that exceeded 10<sup>3</sup> at <em>V</em><sub><em>SD</em></sub> = 0.5 V.</p></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"19 ","pages":"Article 100200"},"PeriodicalIF":2.8000,"publicationDate":"2023-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Micro and Nano Engineering","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S2590007223000308","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0

Abstract

Field-effect transistors (FETs) based on MoS2 nanotubes prepared in anodic aluminum oxide (AAO) templates have been fabricated and demonstrated in this work. MoS2 nanotubes were prepared by the thermal decomposition of (NH4)2MoS4 precursors in the AAO template. The diameter of the MoS2 nanotubes was approximately 80 nm, which corresponded to the size of the AAO template. Schottky-type FETs were prepared with Au and Pt electrodes, and the FETs exhibited n-type behavior, with on/off ratios that exceeded 103 at VSD = 0.5 V.

Abstract Image

阳极氧化铝模板法制备MoS2纳米管场效应晶体管的制备与表征
在阳极氧化铝(AAO)模板中制备了基于MoS2纳米管的场效应晶体管(FET)。通过在AAO模板中热分解(NH4)2MoS4前体来制备MoS2纳米管。MoS2纳米管的直径约为80nm,这对应于AAO模板的尺寸。肖特基型FET是用Au和Pt电极制备的,并且FET表现出n型行为,在VSD=0.5V时导通/关断比超过103。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
Micro and Nano Engineering
Micro and Nano Engineering Engineering-Electrical and Electronic Engineering
CiteScore
3.30
自引率
0.00%
发文量
67
审稿时长
80 days
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