Atomic structure for AlN grown on different plane orientation of sapphire via numerical study

IF 0.7 4区 工程技术 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC
Mazwan Mansor, Syamsul M., Y. Yusuf, Mohd Nazri Abdul Rahman
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引用次数: 0

Abstract

Purpose This study aims to present a numerical study of atomic structure for aluminium nitride (AlN) when the crystal was assumed grown on different orientation of sapphire substrate. The change of the AlN atomic structure with sapphire orientation was associated to the interface between the AlN and the sapphire. The results from this study would provide a guideline in selecting suitable orientation of sapphire for obtaining desirable AlN crystals, in particular, for reducing threading dislocation density in the AlN/sapphire templates for developing UV LEDs. Design/methodology/approach The approach of atomic structure by visualization for electronic and structural analysis numerical method to develop shape of atomic geometry to evaluate which plane are more suitable for the AlGaN technology UV-LED based. Findings The calculation based on ratio on first and second layers can be done by introduction of lattice constant. Research limitations/implications With plane’s color of cutting plane on bulky materials, all the shape looks the same. Practical implications By implementing this method, the authors can save time to find the most suitable plane on the growth structure. Originality/value All authors of this research paper have directly participated in the planning, execution or analysis of the study; all authors of this paper have read and approved the final version submitted; the contents of this manuscript have not been copyrighted or published previously; the contents of this manuscript are not now under consideration for publication elsewhere; the contents of this manuscript will not be copyrighted, submitted or published elsewhere, whereas acceptance by the journal is under consideration.
通过数值研究蓝宝石不同平面取向上生长AlN的原子结构
目的对氮化铝(AlN)晶体在蓝宝石衬底不同取向生长时的原子结构进行了数值研究。氮化铝原子结构随蓝宝石取向的变化与氮化铝与蓝宝石的界面有关。该研究结果将为选择合适的蓝宝石取向以获得理想的AlN晶体提供指导,特别是为减少用于开发UV led的AlN/蓝宝石模板中的螺纹位错密度提供指导。设计/方法学/方法原子结构的方法通过电子可视化和结构分析的数值方法来制定原子几何形状,以评估哪个平面的AlGaN技术更适合UV-LED为基础。通过引入晶格常数,可以实现基于第一层和第二层比率的计算。研究局限/启示:在体积较大的材料上使用平面的颜色切割平面,所有的形状看起来都一样。实际意义通过实现该方法,可以节省在生长结构上寻找最合适平面的时间。原创性/价值本研究论文的所有作者均直接参与了本研究的策划、执行或分析;本文的所有作者已阅读并批准了提交的最终版本;这份手稿的内容以前没有版权或出版;这份手稿的内容目前还没有考虑在其他地方发表;本手稿的内容将不受版权保护,也不会在其他地方提交或发表,而期刊正在考虑是否接受。
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来源期刊
Microelectronics International
Microelectronics International 工程技术-材料科学:综合
CiteScore
1.90
自引率
9.10%
发文量
28
审稿时长
>12 weeks
期刊介绍: Microelectronics International provides an authoritative, international and independent forum for the critical evaluation and dissemination of research and development, applications, processes and current practices relating to advanced packaging, micro-circuit engineering, interconnection, semiconductor technology and systems engineering. It represents a current, comprehensive and practical information tool. The Editor, Dr John Atkinson, welcomes contributions to the journal including technical papers, research papers, case studies and review papers for publication. Please view the Author Guidelines for further details. Microelectronics International comprises a multi-disciplinary study of the key technologies and related issues associated with the design, manufacture, assembly and various applications of miniaturized electronic devices and advanced packages. Among the broad range of topics covered are: • Advanced packaging • Ceramics • Chip attachment • Chip on board (COB) • Chip scale packaging • Flexible substrates • MEMS • Micro-circuit technology • Microelectronic materials • Multichip modules (MCMs) • Organic/polymer electronics • Printed electronics • Semiconductor technology • Solid state sensors • Thermal management • Thick/thin film technology • Wafer scale processing.
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