Microwave plasma system for material processing

IF 1.5 4区物理与天体物理 Q3 PHYSICS, FLUIDS & PLASMAS

IEEE Transactions on Plasma Science Pub Date : 2005-04-01 DOI:10.1109/TPS.2005.845005

S.R. Wylie;A.I. Al-Shamma'a;J. Lucas

引用次数: 22

Abstract

The microwave plasma system operates at various ranges of frequencies including 0.896, 2.45, and 10 GHz, and uses a waveguide-based applicator to generate a microwave plasma jet (MPJ) at atmospheric pressure. The plasma is formed outside the cavity due to the strong electric field, generated by the microwave power, which occurs between the gas nozzle and an aperture in the applicator. The MPJ system has produced plasmas using a variety of gases and gas mixtures, including argon, helium, oxygen, and nitrogen. The MPJ has been used successfully for various materials processing including welding, cutting, and production of fibers from high-melting temperature materials, such as ceramic.

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微波等离子体材料处理系统

微波等离子体系统工作在包括0.896、2.45和10ghz在内的各种频率范围内，并使用基于波导的施加器在大气压下产生微波等离子体射流(MPJ)。等离子体在腔外形成，是由于微波功率产生的强电场，该强电场发生在气体喷嘴和涂敷器的孔径之间。MPJ系统使用多种气体和混合气体产生等离子体，包括氩气、氦气、氧气和氮气。MPJ已成功应用于各种材料加工，包括焊接、切割和高温材料(如陶瓷)的纤维生产。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

IEEE Transactions on Plasma Science 物理-物理：流体与等离子体

CiteScore

3.00

自引率

20.00%

发文量

538

审稿时长

3.8 months

期刊介绍： The scope covers all aspects of the theory and application of plasma science. It includes the following areas: magnetohydrodynamics; thermionics and plasma diodes; basic plasma phenomena; gaseous electronics; microwave/plasma interaction; electron, ion, and plasma sources; space plasmas; intense electron and ion beams; laser-plasma interactions; plasma diagnostics; plasma chemistry and processing; solid-state plasmas; plasma heating; plasma for controlled fusion research; high energy density plasmas; industrial/commercial applications of plasma physics; plasma waves and instabilities; and high power microwave and submillimeter wave generation.