MEMS Young's Modulus and Step Height Measurements With Round Robin Results.

IF 1.5 4区 工程技术
Janet Marshall, Richard A Allen, Craig D McGray, Jon Geist
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引用次数: 1

Abstract

This paper presents the results of a microelectromechanical systems (MEMS) Young's modulus and step height round robin experiment, completed in April 2009, which compares Young's modulus and step height measurement results at a number of laboratories. The purpose of the round robin was to provide data for the precision and bias statements of two \ related Semiconductor Equipment and Materials International (SEMI) standard test methods for MEMS. The technical basis for the test methods on Young's modulus and step height measurements are also provided in this paper. Using the same test method, the goal of the round robin was to assess the repeatability of measurements at one laboratory, by the same operator, with the same equipment, in the shortest practical period of time as well as the reproducibility of measurements with independent data sets from unique combinations of measurement setups and researchers. Both the repeatability and reproducibility measurements were done on random test structures made of the same homogeneous material. The average repeatability Young's modulus value (as obtained from resonating oxide cantilevers) was 64.2 GPa with 95 % limits of ± 10.3 % and an average combined standard uncertainty value of 3.1 GPa. The average reproducibility Young's modulus value was 62.8 GPa with 95 % limits of ± 11.0 % and an average combined standard uncertainty value of 3.0 GPa. The average repeatability step height value (for a metal2-over-poly1 step from active area to field oxide) was 0.477 μm with 95 % limits of 7.9 % and an average combined standard uncertainty value of 0.014 μm. The average reproducibility step height value was 0.481 μm with 95 % limits of ± 6.2 % and an average combined standard uncertainty value of 0.014 μm. In summary, this paper demonstrates that a reliable methodology can be used to measure Young's modulus and step height. Furthermore, a micro and nano technology (MNT) 5-in-1 standard reference material (SRM) can be used by industry to compare their in-house measurements using this methodology with NIST measurements thereby validating their use of the documentary standards.

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基于循环结果的MEMS杨氏模量和阶跃高度测量。
本文介绍了2009年4月完成的微机电系统(MEMS)杨氏模量和阶跃高度轮循实验的结果,比较了多个实验室的杨氏模量和阶跃高度测量结果。该轮询的目的是为两种相关的MEMS半导体设备和材料国际(SEMI)标准测试方法的精度和偏置陈述提供数据。本文还为杨氏模量和台阶高度的测试方法提供了技术依据。使用相同的测试方法,循环测试的目标是在最短的实际时间内,由同一操作员使用相同的设备在一个实验室进行测量的可重复性,以及使用来自不同测量装置和研究人员的独特组合的独立数据集进行测量的可重复性。重复性和再现性测量都是在由相同均质材料制成的随机测试结构上进行的。平均可重复性杨氏模量值(由谐振氧化物悬臂梁获得)为64.2 GPa, 95%限为±10.3%,平均组合标准不确定度值为3.1 GPa。平均重现性杨氏模量值为62.8 GPa, 95%限为±11.0%,平均联合标准不确定度为3.0 GPa。平均重复性阶跃高度(从活性区到原野氧化物的金属-过聚一步)为0.477 μm, 95%限为7.9%,平均组合标准不确定度为0.014 μm。平均重复性步高为0.481 μm, 95%限为±6.2%,平均联合标准不确定度为0.014 μm。总之,本文证明了一种可靠的方法可以用来测量杨氏模量和台阶高度。此外,微纳米技术(MNT) 5合1标准参考材料(SRM)可用于工业界使用该方法将其内部测量结果与NIST测量结果进行比较,从而验证其对文档标准的使用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
自引率
33.30%
发文量
10
期刊介绍: The Journal of Research of the National Institute of Standards and Technology is the flagship publication of the National Institute of Standards and Technology. It has been published under various titles and forms since 1904, with its roots as Scientific Papers issued as the Bulletin of the Bureau of Standards. In 1928, the Scientific Papers were combined with Technologic Papers, which reported results of investigations of material and methods of testing. This new publication was titled the Bureau of Standards Journal of Research. The Journal of Research of NIST reports NIST research and development in metrology and related fields of physical science, engineering, applied mathematics, statistics, biotechnology, information technology.
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