A new Kirkpatrick-Baez-based scanning microscope for the Submicron Resolution X-ray Spectroscopy (SRX) beamline at NSLS-II.

IF 2.4 3区物理与天体物理 Q2 INSTRUMENTS & INSTRUMENTATION

Journal of Synchrotron Radiation Pub Date : 2022-09-01 Epub Date: 2022-07-29 DOI:10.1107/S1600577522007056

E Nazaretski, D S Coburn, W Xu, J Ma, H Xu, R Smith, X Huang, Y Yang, L Huang, M Idir, A Kiss, Y S Chu

引用次数: 0

Abstract

The development, construction, and first commissioning results of a new scanning microscope installed at the 5-ID Submicron Resolution X-ray Spectroscopy (SRX) beamline at NSLS-II are reported. The developed system utilizes Kirkpatrick-Baez mirrors for X-ray focusing. The instrument is designed to enable spectromicroscopy measurements in 2D and 3D with sub-200 nm spatial resolution. The present paper focuses on the design aspects, optical considerations, and specifics of the sample scanning stage, summarizing some of the initial commissioning results.

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用于 NSLS-II 亚微米分辨率 X 射线光谱学 (SRX) 光束线的基于 Kirkpatrick-Baez 的新型扫描显微镜。

报告了安装在 NSLS-II 的 5-ID 亚微米分辨率 X 射线光谱（SRX）光束线的新型扫描显微镜的开发、建造和首次调试结果。开发的系统利用 Kirkpatrick-Baez 镜进行 X 射线聚焦。该仪器可进行空间分辨率低于 200 nm 的二维和三维光谱测量。本文重点介绍了样品扫描阶段的设计方面、光学考虑因素和具体细节，并总结了一些初步调试结果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Journal of Synchrotron Radiation 物理-光学

CiteScore

5.10

自引率

12.00%

发文量

289

审稿时长

4-8 weeks

期刊介绍： Synchrotron radiation research is rapidly expanding with many new sources of radiation being created globally. Synchrotron radiation plays a leading role in pure science and in emerging technologies. The Journal of Synchrotron Radiation provides comprehensive coverage of the entire field of synchrotron radiation and free-electron laser research including instrumentation, theory, computing and scientific applications in areas such as biology, nanoscience and materials science. Rapid publication ensures an up-to-date information resource for scientists and engineers in the field.