Stable microwave coaxial cavity plasma system at atmospheric pressure.

IF 1.7 4区工程技术 Q3 INSTRUMENTS & INSTRUMENTATION

Review of Scientific Instruments Pub Date : 2008-05-01 DOI:10.1063/1.2918980

H Song, J M Hong, K H Lee, J J Choi

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引用次数: 6

Abstract

We present a systematic study of the development of a novel atmospheric microwave plasma system for material processing in the pressure range up to 760 torr and the microwave input power up to 6 kW. Atmospheric microwave plasma was reliably produced and sustained by using a cylindrical resonator with the TM(011) cavity mode. The applicator and the microwave cavity, which is a cylindrical resonator, are carefully designed and optimized with the time dependent finite element Maxwell equation solver. The azimuthal apertures are placed at the maximum magnetic field positions between the cavity and the applicator to maximize the coupling efficiency into the microwave plasma at a resonant frequency of 2.45 GHz. The system consists of a magnetron power supply, a circulator, a directional coupler, a three-stub tuner, a dummy load, a coaxial cavity, and a central cavity. Design and construction of the resonant structures and diagnostics of atmospheric plasma using optical experiments are discussed in various ranges of pressure and microwave input power for different types of gases.

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常压下稳定的微波同轴腔等离子体系统。

本文系统地研究了一种新型大气微波等离子体系统的开发，该系统用于材料加工，压力范围高达760 torr，微波输入功率高达6 kW。利用TM(011)腔模式的圆柱形谐振器可靠地产生和维持了大气微波等离子体。利用随时间变化的有限元麦克斯韦方程求解器对施加器和圆柱形谐振腔进行了优化设计。在谐振频率为2.45 GHz的微波等离子体中，在腔体和施加器之间的最大磁场位置放置方位孔，以最大限度地提高耦合效率。该系统由磁控管电源、环行器、定向耦合器、三根调谐器、虚拟负载、同轴腔和中心腔组成。讨论了在不同压力和微波输入功率下大气等离子体共振结构的设计、构造和光学实验诊断。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Review of Scientific Instruments 工程技术-物理：应用

CiteScore

3.00

自引率

12.50%

发文量

758

审稿时长

2.6 months

期刊介绍： Review of Scientific Instruments, is committed to the publication of advances in scientific instruments, apparatuses, and techniques. RSI seeks to meet the needs of engineers and scientists in physics, chemistry, and the life sciences.