Capillary-Assisted Automated Silver Direct Bond of Chip-on-Chip Through a Novel Sponge-Dipping Approach

IF 3.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC
Jonas Weber;Hubert Rauh;Jürgen Leib;Martin März
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Abstract

Silver direct bonding is an organic-free joining technique for chip-on-chip power electronic assemblies that eliminates the need for sinter paste, but also removes the temporary chip-tacking function that the paste normally provides. This article presents a simple and cost-effective sponge-dipping approach, in which a water-soaked sponge module is integrated into a conventional pick-and-place process. The resulting capillary forces retain the chips in position during multichip stacking without requiring a dedicated dispensing unit or hydrophobic surface patterning. Experiments on five-chip stack assemblies with three chip footprints ( $4\times 4$ , $8\times 8$ , and $10\times 10$ mm ${}^{2}$ ) show that capillary assistance increases the yield to 100% for the two larger footprints, eliminates complete placement failures across all chip sizes, and reduces misalignment. Scanning acoustic microscopy (SAM) and cross-sectional scanning electron microscope (SEM)/energy-dispersive X-ray (EDX) analyses reveal no significant mineral contamination at the Ag–Ag bonding interface, indicating that the applied deionized (DI) water does not measurably affect bond quality under the tested conditions.
一种新型海绵浸渍方法的毛细管辅助银片直接键合
银直接连接是一种无有机连接技术,用于芯片上的电力电子组件,它消除了对烧结浆料的需求,但也消除了浆料通常提供的临时芯片粘接功能。本文介绍了一种简单且具有成本效益的海绵浸渍方法,其中将浸水海绵模块集成到传统的拾取过程中。由此产生的毛细管力在多芯片堆叠期间保持芯片的位置,而不需要专用的分配单元或疏水表面图案。在具有三个芯片足迹($4\times 4$, $8\times 8$和$10\times 10$ mm{}^{2}$)的五芯片堆栈组件上进行的实验表明,毛细管辅助将两个较大足迹的良率提高到100%,消除了所有芯片尺寸的完全放置失败,并减少了错位。扫描声学显微镜(SAM)和横断面扫描电子显微镜(SEM)/能量色散x射线(EDX)分析显示,Ag-Ag键合界面没有明显的矿物污染,表明在测试条件下,施加去离子水(DI)对键合质量没有明显影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
IEEE Transactions on Components, Packaging and Manufacturing Technology
IEEE Transactions on Components, Packaging and Manufacturing Technology ENGINEERING, MANUFACTURING-ENGINEERING, ELECTRICAL & ELECTRONIC
CiteScore
4.70
自引率
13.60%
发文量
203
审稿时长
3 months
期刊介绍: IEEE Transactions on Components, Packaging, and Manufacturing Technology publishes research and application articles on modeling, design, building blocks, technical infrastructure, and analysis underpinning electronic, photonic and MEMS packaging, in addition to new developments in passive components, electrical contacts and connectors, thermal management, and device reliability; as well as the manufacture of electronics parts and assemblies, with broad coverage of design, factory modeling, assembly methods, quality, product robustness, and design-for-environment.
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