Candidate Overtone Shear Horizontal SAW Resonators in Thin-Film Lithium Niobate for Intermodal Acousto-Optic Modulation

IF 3.6 2区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Transactions on Electron Devices Pub Date : 2026-08-01 Epub Date: 2026-06-30 DOI:10.1109/TED.2026.3705013

Wenbing Jiang;Xuankai Xu;Yu Guo;Boyu Zhang;Lihui Jin;Xiao Chen;Tao Wu;Libing Zhou

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引用次数: 0

Abstract

The merits of thin-film surface acoustic wave (SAW) devices are pivotal to developing high-performance intermodal acousto-optic modulators. In this work, we have proposed shear-horizontal (SH) SAW resonators for anticipated intermodal acousto-optic modulation (AOM) on the thin-film lithium niobate (LN) platform. Through optimization of the cut angle of LN films, the SAW wavelength, and the thickness of interdigital transducer (IDT) electrodes, the calculated acousto-optic overlap factors utilizing SH0 modes are improved by more than an order of magnitude compared with those of Rayleigh modes. Furthermore, we have fabricated and characterized three kinds of proof-of-principle SH0 mode devices without/with grating reflectors (GRs). The electromechanical coupling coefficients (

$\textit {k}_{\substack {\text {eff}}}^{\substack {{2}}}$

) and quality factors (

$Q$

) in the overtone resonators with GRs are systematically evaluated, featuring the highest

$Q$

of 843 with the compromised

$\textit {k}_{\substack {\text {eff}}}^{\substack {{2}}}$

of 0.96%–4.72%. The results reveal that the temperature coefficients of frequency (TCF) of Rayleigh modes vary across various overtones, whereas the SH0 modes exhibit TCFs in the range of 32.3–68.9 ppm/°C. Our fabricated SH0-mode overtone resonators demonstrate the capability of operating at power levels up to 29 dBm without electrode damage, offering a promising paradigm for robust and high-efficiency intermodal acousto-optic modulators with potential applications in integrated optical signal processing, microwave photonics, and quantum information technologies.

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薄膜铌酸锂用于多模态声光调制的候选泛音剪切水平SAW谐振器

薄膜表面声波（SAW）器件的优点是开发高性能多模态声光调制器的关键。在这项工作中，我们提出了剪切-水平（SH） SAW谐振器，用于薄膜铌酸锂（LN）平台上预期的多模态声光调制（AOM）。通过优化LN薄膜的切割角度、SAW波长和数字间换能器（IDT）电极的厚度，利用SH0模式计算的声光重叠系数比瑞利模式提高了一个数量级以上。此外，我们还制作和表征了三种无光栅反射器（GRs）的SH0模式器件的原理验证。系统评价了带GRs的谐波谐振器的机电耦合系数（$\textit {k}_{\substack {\text {eff}}}} {\substack{{2}}}$）和质量因子（$Q$），其中$Q$最高为843，受损$\textit {k}_{\substack {\text {eff}}}} {\substack{{2}}}$为0.96% ~ 4.72%。结果表明，瑞利模式的频率温度系数（TCF）在不同泛音范围内变化，而SH0模式的TCF在32.3-68.9 ppm/°C范围内。我们制造的sh0模式泛音谐振器显示出在高达29 dBm的功率水平下工作而不损坏电极的能力，为鲁棒和高效的多式声光调制器提供了一个有前途的范例，在集成光信号处理、微波光子学和量子信息技术方面具有潜在的应用前景。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

IEEE Transactions on Electron Devices 工程技术-工程：电子与电气

CiteScore

5.80

自引率

16.10%

发文量

937

审稿时长

3.8 months

期刊介绍： IEEE Transactions on Electron Devices publishes original and significant contributions relating to the theory, modeling, design, performance and reliability of electron and ion integrated circuit devices and interconnects, involving insulators, metals, organic materials, micro-plasmas, semiconductors, quantum-effect structures, vacuum devices, and emerging materials with applications in bioelectronics, biomedical electronics, computation, communications, displays, microelectromechanics, imaging, micro-actuators, nanoelectronics, optoelectronics, photovoltaics, power ICs and micro-sensors. Tutorial and review papers on these subjects are also published and occasional special issues appear to present a collection of papers which treat particular areas in more depth and breadth.