Quantifying the Global Impact of Constraint Programming-Based Local Scheduling in Semiconductor Manufacturing

IF 2.5 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC
Patrick Stöckermann;Niels Hayen;Pierre Tassel;Alessandro Immordino;Thomas Altenmüller;Martin Gebser;Konstantin Schekotihin;Georg Seidel
{"title":"Quantifying the Global Impact of Constraint Programming-Based Local Scheduling in Semiconductor Manufacturing","authors":"Patrick Stöckermann;Niels Hayen;Pierre Tassel;Alessandro Immordino;Thomas Altenmüller;Martin Gebser;Konstantin Schekotihin;Georg Seidel","doi":"10.1109/TSM.2026.3678175","DOIUrl":null,"url":null,"abstract":"The efficiency of semiconductor frontend manufacturing highly depends on the optimization of resource allocation. In academic works, scheduling methods, i.e., based on Constraint Programming (CP) or Mixed Integer Programming (MIP), are popular tools for solving this optimization problem. As the problem is NP-hard, complete optimization methods do not scale to the problem size and complexity required for realistic fab-wide scheduling. Therefore, the problem is often decomposed and solved locally. While we can track the solution gap or even compute exact solutions for sufficiently small local problem instances, the fab-wide impact of decomposition strategies is yet to be determined in a realistic setting. In this work, we empirically quantify the impact of locally applied optimization on the fab-wide throughput and tardiness. For this evaluation, we use a local CP-based optimization method to compute large-scale schedules in the dynamic and stochastic environment of a semiconductor frontend manufacturing facility. We investigate the local and global impact of our method in different settings using a high-fidelity simulation environment. The results show that the CP-based scheduling method is able to significantly improve locally over advanced expert-drafted heuristics. On the global scale, we show that local optimization delivers inconsistent and varying results, stressing the need for an injection of global information into the local problem formulation.","PeriodicalId":451,"journal":{"name":"IEEE Transactions on Semiconductor Manufacturing","volume":"39 2","pages":"299-309"},"PeriodicalIF":2.5000,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11456594","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Transactions on Semiconductor Manufacturing","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/11456594/","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"2026/3/26 0:00:00","PubModel":"Epub","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0

Abstract

The efficiency of semiconductor frontend manufacturing highly depends on the optimization of resource allocation. In academic works, scheduling methods, i.e., based on Constraint Programming (CP) or Mixed Integer Programming (MIP), are popular tools for solving this optimization problem. As the problem is NP-hard, complete optimization methods do not scale to the problem size and complexity required for realistic fab-wide scheduling. Therefore, the problem is often decomposed and solved locally. While we can track the solution gap or even compute exact solutions for sufficiently small local problem instances, the fab-wide impact of decomposition strategies is yet to be determined in a realistic setting. In this work, we empirically quantify the impact of locally applied optimization on the fab-wide throughput and tardiness. For this evaluation, we use a local CP-based optimization method to compute large-scale schedules in the dynamic and stochastic environment of a semiconductor frontend manufacturing facility. We investigate the local and global impact of our method in different settings using a high-fidelity simulation environment. The results show that the CP-based scheduling method is able to significantly improve locally over advanced expert-drafted heuristics. On the global scale, we show that local optimization delivers inconsistent and varying results, stressing the need for an injection of global information into the local problem formulation.
半导体制造中基于约束规划的局部调度的全局影响量化
半导体前端制造的效率在很大程度上取决于资源配置的优化。在学术工作中,调度方法,即基于约束规划(CP)或混合整数规划(MIP),是解决这一优化问题的常用工具。由于问题是np困难的,完整的优化方法不能扩展到实际的晶圆厂范围调度所需的问题规模和复杂性。因此,问题往往被分解并局部解决。虽然我们可以跟踪解决方案的差距,甚至可以为足够小的局部问题实例计算精确的解决方案,但是分解策略的晶圆厂范围的影响还有待在现实环境中确定。在这项工作中,我们实证量化了局部应用优化对晶圆厂范围内吞吐量和延迟的影响。为了进行评估,我们使用基于局部cp的优化方法来计算半导体前端制造工厂动态和随机环境中的大规模调度。我们使用高保真仿真环境研究了我们的方法在不同设置下的局部和全局影响。结果表明,与先进的专家起草启发式调度方法相比,基于cp的调度方法具有显著的局部改进。在全局尺度上,我们表明局部优化提供了不一致和不同的结果,强调需要将全局信息注入到局部问题公式中。
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来源期刊
IEEE Transactions on Semiconductor Manufacturing
IEEE Transactions on Semiconductor Manufacturing 工程技术-工程:电子与电气
CiteScore
5.20
自引率
11.10%
发文量
101
审稿时长
3.3 months
期刊介绍: The IEEE Transactions on Semiconductor Manufacturing addresses the challenging problems of manufacturing complex microelectronic components, especially very large scale integrated circuits (VLSI). Manufacturing these products requires precision micropatterning, precise control of materials properties, ultraclean work environments, and complex interactions of chemical, physical, electrical and mechanical processes.
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