Challenges and opportunities in Ga2O3 solar-blind photodetectors: From material engineering to device realization

IF 5.2 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC
Chao Shi, Quanjiang Lv, Rui Ren, Wei Xiong, Zi Wang, Yin Yin, Junlin Liu
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Abstract

Ultraviolet (UV) photodetectors have attracted extensive attention in both civilian and military applications due to their critical roles in environmental monitoring, flame detection, missile warning, and space communication. Among various UV-sensitive materials, Ga2O3 has emerged as a highly promising candidate owing to its ultra-wide bandgap (4.7-4.9 eV), excellent thermal and chemical stability, strong radiation hardness, cost-effectiveness, and high transparency to visible light. Its bandgap precisely corresponds to the solar-blind UV region (λ < 280 nm), enabling intrinsic solar-blind photodetection without the need for optical filters. This review focuses on the recent progress of Ga2O3-based solar-blind UV photodetectors, emphasizing the relationship between intrinsic material properties and device performance. It first outlines various growth techniques for Ga2O3 with different crystal orientations and discusses their influence on crystal quality and defect control. Subsequently, recent advances in Ga2O3 photodetector architectures including metal-semiconductor-metal devices, Schottky photodiodes, heterojunctions, and phototransistors-are comprehensively reviewed, with comparative analyses of their operational mechanisms and performance metrics. Furthermore, the development of Ga2O3-based avalanche photodiodes is highlighted as a key step toward practical, high-gain solar-blind photodetection. Finally, the review summarizes current challenges and future directions, focusing on doping control, defect engineering, and heterostructure design to optimize device performance and enabling large-scale applications.
Ga2O3太阳盲光电探测器的挑战与机遇:从材料工程到器件实现
紫外光电探测器由于在环境监测、火焰探测、导弹预警和空间通信等方面的重要作用,在民用和军事应用中引起了广泛的关注。在各种紫外线敏感材料中,Ga2O3因其超宽带隙(4.7-4.9 eV)、优异的热稳定性和化学稳定性、强辐射硬度、高成本效益和高可见光透明度而成为极有前途的候选材料。它的带隙精确地对应于日盲紫外区(λ < 280 nm),无需光学滤光片即可实现本征日盲光探测。本文综述了基于ga2o3的太阳盲紫外光电探测器的最新进展,重点介绍了材料固有特性与器件性能之间的关系。首先概述了不同晶向的Ga2O3生长技术,并讨论了它们对晶体质量和缺陷控制的影响。随后,全面回顾了Ga2O3光电探测器结构的最新进展,包括金属-半导体-金属器件,肖特基光电二极管,异质结和光电晶体管,并对其工作机制和性能指标进行了比较分析。此外,基于ga2o3的雪崩光电二极管的开发是实现实用的高增益太阳盲光电探测的关键一步。最后,总结了当前面临的挑战和未来的发展方向,重点关注掺杂控制、缺陷工程和异质结构设计,以优化器件性能并实现大规模应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
Materials Science in Semiconductor Processing
Materials Science in Semiconductor Processing 工程技术-材料科学:综合
CiteScore
8.00
自引率
4.90%
发文量
780
审稿时长
42 days
期刊介绍: Materials Science in Semiconductor Processing provides a unique forum for the discussion of novel processing, applications and theoretical studies of functional materials and devices for (opto)electronics, sensors, detectors, biotechnology and green energy. Each issue will aim to provide a snapshot of current insights, new achievements, breakthroughs and future trends in such diverse fields as microelectronics, energy conversion and storage, communications, biotechnology, (photo)catalysis, nano- and thin-film technology, hybrid and composite materials, chemical processing, vapor-phase deposition, device fabrication, and modelling, which are the backbone of advanced semiconductor processing and applications. Coverage will include: advanced lithography for submicron devices; etching and related topics; ion implantation; damage evolution and related issues; plasma and thermal CVD; rapid thermal processing; advanced metallization and interconnect schemes; thin dielectric layers, oxidation; sol-gel processing; chemical bath and (electro)chemical deposition; compound semiconductor processing; new non-oxide materials and their applications; (macro)molecular and hybrid materials; molecular dynamics, ab-initio methods, Monte Carlo, etc.; new materials and processes for discrete and integrated circuits; magnetic materials and spintronics; heterostructures and quantum devices; engineering of the electrical and optical properties of semiconductors; crystal growth mechanisms; reliability, defect density, intrinsic impurities and defects.
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