Robust five-degree-of-freedom error measurement in complex environments using composite sensing and SLM-based beam modulation

IF 6.1 2区工程技术 Q1 ENGINEERING, MULTIDISCIPLINARY

Measurement Pub Date : 2026-05-05 Epub Date: 2026-03-02 DOI:10.1016/j.measurement.2026.121031

Chuanzhi Tang , Wenzheng Liu , Fajie Duan , Jinfeng Lan , Jinlai Zhang , Chenhui Deng , Jiawei Chu

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引用次数: 0

Abstract

The continuous advancement of high-end equipment manufacturing toward higher precision and enhanced robustness has imposed significant challenges on geometric error measurement under complex environments and long-range conditions. To address the significant impact of beam quality degradation on laser collimation measurement performance, a laser-based five-degree-of-freedom (5-DOF) error measurement method incorporating composite sensing and spatial light modulator (SLM)-based beam modulation is proposed in this paper for operation under complex conditions. A charge-coupled device (CCD) is employed as an auxiliary observation channel to enable real-time monitoring of critical beam characteristics, such as spot centroid drift, shape distortion, and energy non-uniformity. Combined with high-accuracy centroid data acquired from a quadrant photodiode (QPD) and a position-sensitive detector (PSD), a multi-sensor fusion-based composite perception model is established. On this basis, a beam deviation fusion estimation algorithm with dynamic weighting is developed to improve the accuracy and robustness of multi-source data integration. Furthermore, a dual-loop feedback control framework is designed to coordinate beam quality optimization and drift compensation, driving the SLM for composite phase modulation and achieving high-precision laser 5-DOF error measurement over extended distances. Experimental validation demonstrates that within a 3 m measurement range, the proposed method reduces translational drift from 37.31 μm to 3.38 μm and angular drift from 24.35 μm to 1.56 μm, enhances beam rotational symmetry to 0.949, and maintains energy concentration above 0.56. The proposed method has been validated to achieve high measurement precision, system stability, and environmental adaptability, providing a robust technical foundation for high-accuracy optical metrology under complex operational conditions.

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基于复合传感和slm波束调制的复杂环境下鲁棒五自由度误差测量

高端装备制造不断向高精度和鲁棒性方向发展，对复杂环境和远程条件下的几何误差测量提出了重大挑战。针对光束质量退化对激光准直测量性能的显著影响，提出了一种结合复合传感和空间光调制器（SLM）光束调制的激光五自由度误差测量方法，用于复杂条件下的测量。采用电荷耦合器件（CCD）作为辅助观测通道，实时监测光斑质心漂移、形状畸变、能量不均匀性等光束关键特性。结合象限光电二极管（QPD）和位置敏感探测器（PSD）采集的高精度质心数据，建立了基于多传感器融合的复合感知模型。在此基础上，提出了一种动态加权波束偏差融合估计算法，提高了多源数据融合的精度和鲁棒性。此外，设计了双环反馈控制框架，协调光束质量优化和漂移补偿，驱动SLM进行复合相位调制，实现长距离高精度激光五自由度误差测量。实验验证表明，在3 m测量范围内，该方法将光束的平移漂移从37.31 μm减小到3.38 μm，角漂移从24.35 μm减小到1.56 μm，光束的旋转对称性提高到0.949，能量浓度保持在0.56以上。该方法具有较高的测量精度、系统稳定性和环境适应性，为复杂操作条件下的高精度光学计量提供了坚实的技术基础。

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来源期刊

Measurement 工程技术-工程：综合

CiteScore

10.20

自引率

12.50%

发文量

1589

审稿时长

12.1 months

期刊介绍： Contributions are invited on novel achievements in all fields of measurement and instrumentation science and technology. Authors are encouraged to submit novel material, whose ultimate goal is an advancement in the state of the art of: measurement and metrology fundamentals, sensors, measurement instruments, measurement and estimation techniques, measurement data processing and fusion algorithms, evaluation procedures and methodologies for plants and industrial processes, performance analysis of systems, processes and algorithms, mathematical models for measurement-oriented purposes, distributed measurement systems in a connected world.