In Situ Electron Microscopy for Plasma-Enabled Nanoengineering

IF 3.5 3区物理与天体物理 Q3 ENGINEERING, CHEMICAL

Plasma Chemistry and Plasma Processing Pub Date : 2026-02-16 DOI:10.1007/s11090-025-10608-6

Jae Hyun Nam, Peter J. Bruggeman

引用次数: 0

Abstract

Non-thermal plasma is a versatile tool for nanoengineering applications. Nonetheless describing the typical highly dynamic mechanisms underpinning these applications remains a significant challenge, as insights have traditionally relied on postmortem analysis. Electron microscopy (EM) is routinely used for visualizing small scale structures, surpassing the diffraction limit of optical microscopy. In situ EM offers a powerful pathway to directly observe small scale processes in real-time for a broad range of research fields. However, integrating plasma environments with the high-vacuum conditions of electron microscopes remains a formidable technical challenge. This article provides an overview of in situ EM applications in the field of plasmas. We summarize early implementations of in situ plasma EM, highlight recent technical advancements and key findings, and propose future developments beneficial for advancing the field of plasma nanoengineering.

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等离子体纳米工程的原位电子显微镜

非热等离子体是纳米工程应用的通用工具。尽管如此，描述支撑这些应用程序的典型的高动态机制仍然是一个重大挑战，因为传统上的见解依赖于事后分析。电子显微镜（EM）通常用于可视化小尺度结构，超过光学显微镜的衍射极限。原位电磁为广泛的研究领域提供了直接实时观察小尺度过程的有力途径。然而，将等离子体环境与电子显微镜的高真空条件相结合仍然是一个巨大的技术挑战。本文综述了原位电磁技术在等离子体领域的应用。我们总结了原位等离子体电磁的早期实现，重点介绍了最近的技术进展和关键发现，并提出了有利于推进等离子体纳米工程领域的未来发展。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Plasma Chemistry and Plasma Processing 工程技术-工程：化工

CiteScore

5.90

自引率

8.30%

发文量

审稿时长

6-12 weeks

期刊介绍： Publishing original papers on fundamental and applied research in plasma chemistry and plasma processing, the scope of this journal includes processing plasmas ranging from non-thermal plasmas to thermal plasmas, and fundamental plasma studies as well as studies of specific plasma applications. Such applications include but are not limited to plasma catalysis, environmental processing including treatment of liquids and gases, biological applications of plasmas including plasma medicine and agriculture, surface modification and deposition, powder and nanostructure synthesis, energy applications including plasma combustion and reforming, resource recovery, coupling of plasmas and electrochemistry, and plasma etching. Studies of chemical kinetics in plasmas, and the interactions of plasmas with surfaces are also solicited. It is essential that submissions include substantial consideration of the role of the plasma, for example, the relevant plasma chemistry, plasma physics or plasma–surface interactions; manuscripts that consider solely the properties of materials or substances processed using a plasma are not within the journal’s scope.