Assessing the Role of Surface and Volume Processes for Atomic Oxygen Losses in CO2 Glow Discharges in Pyrex

IF 3.5 3区物理与天体物理 Q3 ENGINEERING, CHEMICAL

Plasma Chemistry and Plasma Processing Pub Date : 2026-02-06 DOI:10.1007/s11090-025-10607-7

Pedro Viegas, Blandine Berdugo, Vasco Guerra

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引用次数: 0

Abstract

This work examines how to estimate an effective O(³P) surface recombination probability \(\gamma _\textrm{O}\) in CO₂ plasmas in Pyrex from the temporal evolution of its density, measured in modulated current conditions in DC glow discharges. Zero-dimensional simulations are used under steady-state and current modulation conditions to analyse experimental data available for pressures in the range 0.2–5 Torr and currents between 10 and 50 mA. It is shown that the estimation of \(\gamma _\textrm{O}\) is simpler in CO₂ than in O₂, as in the former case it can be realistically estimated by assuming that the net losses of O(³P) correspond to surface recombination losses only, while in the latter case volume recombination and flow losses have to be additionally taken into account. The main reason for this difference is the lower fraction of oxygen species in CO₂ plasmas, leading to much lower volume recombination rates.

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评估表面和体积过程对二氧化碳辉光放电中原子氧损失的作用

这项工作研究了如何通过在直流辉光放电调制电流条件下测量的密度的时间演变来估计Pyrex中CO2等离子体中有效的O（3P）表面重组概率\(\gamma _\textrm{O}\)。在稳态和电流调制条件下使用零维模拟来分析0.2-5 Torr范围内的压力和10 - 50 mA之间的电流的实验数据。结果表明，CO2中\(\gamma _\textrm{O}\)的估算比O2中更简单，因为在CO2中，假设O（3P）的净损失只对应于表面复合损失，就可以实际地估算出来，而在O2中，体积复合和流动损失必须额外考虑在内。造成这种差异的主要原因是CO2等离子体中氧气的比例较低，导致体积重组率低得多。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Plasma Chemistry and Plasma Processing 工程技术-工程：化工

CiteScore

5.90

自引率

8.30%

发文量

审稿时长

6-12 weeks

期刊介绍： Publishing original papers on fundamental and applied research in plasma chemistry and plasma processing, the scope of this journal includes processing plasmas ranging from non-thermal plasmas to thermal plasmas, and fundamental plasma studies as well as studies of specific plasma applications. Such applications include but are not limited to plasma catalysis, environmental processing including treatment of liquids and gases, biological applications of plasmas including plasma medicine and agriculture, surface modification and deposition, powder and nanostructure synthesis, energy applications including plasma combustion and reforming, resource recovery, coupling of plasmas and electrochemistry, and plasma etching. Studies of chemical kinetics in plasmas, and the interactions of plasmas with surfaces are also solicited. It is essential that submissions include substantial consideration of the role of the plasma, for example, the relevant plasma chemistry, plasma physics or plasma–surface interactions; manuscripts that consider solely the properties of materials or substances processed using a plasma are not within the journal’s scope.