{"title":"Enhanced Operational Stability of Flexible Carbon Nanotube Thin Film Transistors Using Low-Temperature Post-Treatment","authors":"Haitao Zhang;Xiongfeng Zou;Jian Hu;Hui Wang;Li Xiang","doi":"10.1109/TMAT.2025.3638976","DOIUrl":null,"url":null,"abstract":"Carbon nanotubes (CNTs) have been extensively investigated as channel materials for flexible electronics, owing to their inherent flexibility, high carrier mobility, ultrathin body, and solution-based, low-temperature processibility. However, achieving robust operation of CNT thin-film transistors (TFTs) under repeated bias cycling in air, a crucial requirement for complex and large-scale circuits, remains a challenge. In this work, we present a low-temperature hexamethyldisilazane (HMDS) post-treatment (150 °c) to enhance the robustness of flexible, bottom-gated CNT TFTs. This treatment significantly reduces device hysteresis and improves threshold voltage (V<sub>th</sub>) stability under repeated bias cycling, decreasing the relative standard deviation (S<sub>r</sub>) of V<sub>th</sub> from 136% to 34.1% and from 77.3% to 4.23% under different measurement modes. The mechanisms underlying this V<sub>th</sub> stability enhancement are primarily attributed to a significant reduction in device surface traps: (1) prolonged 150 °C post-treatment in a vacuum oven promotes the desorption of oxygen and water molecules from the active layer and dielectric surface; (2) HMDS reacts with polar hydroxyl groups on the device surface, generating hydrophobic, non-polar methyl groups, thereby reducing surface charge accumulation; and (3) the hydrophobic nature of the HMDS layer on the device surface contributes to insulating the device from ambient oxygen and water molecules.","PeriodicalId":100642,"journal":{"name":"IEEE Transactions on Materials for Electron Devices","volume":"2 ","pages":"151-155"},"PeriodicalIF":0.0000,"publicationDate":"2025-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Transactions on Materials for Electron Devices","FirstCategoryId":"1085","ListUrlMain":"https://ieeexplore.ieee.org/document/11271562/","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Carbon nanotubes (CNTs) have been extensively investigated as channel materials for flexible electronics, owing to their inherent flexibility, high carrier mobility, ultrathin body, and solution-based, low-temperature processibility. However, achieving robust operation of CNT thin-film transistors (TFTs) under repeated bias cycling in air, a crucial requirement for complex and large-scale circuits, remains a challenge. In this work, we present a low-temperature hexamethyldisilazane (HMDS) post-treatment (150 °c) to enhance the robustness of flexible, bottom-gated CNT TFTs. This treatment significantly reduces device hysteresis and improves threshold voltage (Vth) stability under repeated bias cycling, decreasing the relative standard deviation (Sr) of Vth from 136% to 34.1% and from 77.3% to 4.23% under different measurement modes. The mechanisms underlying this Vth stability enhancement are primarily attributed to a significant reduction in device surface traps: (1) prolonged 150 °C post-treatment in a vacuum oven promotes the desorption of oxygen and water molecules from the active layer and dielectric surface; (2) HMDS reacts with polar hydroxyl groups on the device surface, generating hydrophobic, non-polar methyl groups, thereby reducing surface charge accumulation; and (3) the hydrophobic nature of the HMDS layer on the device surface contributes to insulating the device from ambient oxygen and water molecules.