Microwave humidity sensor based on interdigital capacitors with compact size and enhanced sensitivity

IF 5.6 2区 工程技术 Q1 ENGINEERING, MULTIDISCIPLINARY
Guangsheng Deng , Qiang Zhang , Yanbin Yu , Jun Yang , Ying Li , Wenbing Zhang , Zhiping Yin
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引用次数: 0

Abstract

This paper introduces a novel highly sensitive microwave humidity sensor based on a pair of planar split ring resonators, incorporating the intensive and localized resonance excited by the interdigital electrodes to detect relative humidity variation in the environment via spectroscopy analysis. A 0.25 mm thick replaceable polyimide (PI) film, whose relative permittivity is in close relate with the relative humidity of the environment, was covered on the interdigital electrodes and used as the moisture sensing material of the proposed sensor. Therefore, the resonance frequency of the sensor, which is highly sensitive to the relative permittivity of the PI film, varies with different humidities. The sensor experimentally demonstrated a high sensitivity of 2.02 MHz/%RH within a wide humidity monitoring range of 30–78 % RH, which significantly outperforms the reported microwave humidity sensors. Meanwhile, the sensor exhibits comparable hysteresis performance to commercial sensors during the testing cycles, which holds significant importance for practical applications. The proposed sensor, features a compact size with low cost and high sensitivity, provides a solution for precise humidity variation detecting from a spectrum measurement perspective.
基于数字间电容的微波湿度传感器体积小,灵敏度高
本文介绍了一种新型的高灵敏度微波湿度传感器,该传感器基于一对平面分裂环谐振器,利用数字间电极激发的强共振和局部共振,通过光谱分析来检测环境中的相对湿度变化。将相对介电常数与环境相对湿度密切相关的0.25 mm厚可替换聚酰亚胺(PI)薄膜覆盖在指间电极上,作为传感器的水分传感材料。因此,对PI膜的相对介电常数高度敏感的传感器的共振频率随湿度的不同而变化。实验证明,该传感器在30 - 78% RH的湿度监测范围内具有2.02 MHz/%RH的高灵敏度,显著优于已有的微波湿度传感器。同时,该传感器在测试周期中表现出与商用传感器相当的滞回性能,这对实际应用具有重要意义。该传感器具有体积小、成本低、灵敏度高的特点,从光谱测量的角度为精确的湿度变化检测提供了解决方案。
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来源期刊
Measurement
Measurement 工程技术-工程:综合
CiteScore
10.20
自引率
12.50%
发文量
1589
审稿时长
12.1 months
期刊介绍: Contributions are invited on novel achievements in all fields of measurement and instrumentation science and technology. Authors are encouraged to submit novel material, whose ultimate goal is an advancement in the state of the art of: measurement and metrology fundamentals, sensors, measurement instruments, measurement and estimation techniques, measurement data processing and fusion algorithms, evaluation procedures and methodologies for plants and industrial processes, performance analysis of systems, processes and algorithms, mathematical models for measurement-oriented purposes, distributed measurement systems in a connected world.
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