Impact of gas cell material and length on the performance of MEMS-based pulsed infrared emitters for gas sensing applications

IF 5.6 2区工程技术 Q1 ENGINEERING, MULTIDISCIPLINARY

Measurement Pub Date : 2025-10-06 DOI:10.1016/j.measurement.2025.119075

Vinay Goyal , Vishali Singh , Ajay Kumar , Rahul Prajesh

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Abstract

This work presents a comprehensive study of MEMS-based pulsed infrared (IR) emitters and their integration with gas cell configurations for non-dispersive infrared (NDIR) CO₂ sensing. A dual-spiral platinum microheater was designed, simulated, and fabricated using standard MEMS processes, achieving efficient thermal performance with low power consumption and high modulation depth (100% up to 5 Hz). System-level evaluations examined the effects of optical path length and gas cell materials (Teflon, aluminum, and copper) on detector signal. Experimental results confirmed an exponential decay in signal with increased path length, consistent with the Beer–Lambert law, and demonstrated superior reflectivity and signal strength in copper-based gas cells. The sensor showed linear CO₂ detection up to 6% concentration, with saturation beyond this point, and sustained stable operation over 100,000 pulsing cycles. These findings highlight the importance of emitter–gas cell co-design in enhancing the sensitivity, efficiency, and miniaturization of NDIR gas sensing systems.

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气电池材料和长度对气敏用mems脉冲红外发射器性能的影响

本文对基于mems的脉冲红外（IR）发射器及其与用于非色散红外（NDIR） CO2传感的气体电池结构的集成进行了全面研究。采用标准MEMS工艺设计、模拟和制作了双螺旋铂微加热器，实现了低功耗、高调制深度（100%至5 Hz）的高效热性能。系统级评估检查了光路长度和气体电池材料（聚四氟乙烯、铝和铜）对探测器信号的影响。实验结果证实了信号随路径长度的增加呈指数衰减，符合比尔-朗伯定律，并证明了铜基气体电池具有优越的反射率和信号强度。该传感器的线性CO2检测浓度可达6%，超过此浓度后仍可达到饱和，并在100,000脉冲周期内持续稳定运行。这些发现强调了发射器-气池协同设计在提高NDIR气体传感系统的灵敏度、效率和小型化方面的重要性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Measurement 工程技术-工程：综合

CiteScore

10.20

自引率

12.50%

发文量

1589

审稿时长

12.1 months

期刊介绍： Contributions are invited on novel achievements in all fields of measurement and instrumentation science and technology. Authors are encouraged to submit novel material, whose ultimate goal is an advancement in the state of the art of: measurement and metrology fundamentals, sensors, measurement instruments, measurement and estimation techniques, measurement data processing and fusion algorithms, evaluation procedures and methodologies for plants and industrial processes, performance analysis of systems, processes and algorithms, mathematical models for measurement-oriented purposes, distributed measurement systems in a connected world.