Si-based amorphous SnO2 vertical heterojunction photodetectors with high responsivity and nanosecond photoresponse

IF 5 2区物理与天体物理 Q1 OPTICS

Optics and Laser Technology Pub Date : 2025-09-30 DOI:10.1016/j.optlastec.2025.113930

Can Zhang , Hongyan Yin , Sui Mao , Dongyang Li , Hao Jing , Xuelei Cao , Peng Liu , Enze Li , Junwei Nan , Peter Strizhak , Linjun Huang , Jianguo Tang

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引用次数: 0

Abstract

Photodetectors play a crucial role in the field of optoelectronic communications and other information-related domains. Si as one of the most important materials for visible light detection, has its performance constrained by factors such as its low absorption coefficient, which limits the further enhancement of commercial photodetector performance. In this work, by employing a SnO₂ heterojunction, we have fabricated a MSM structured photodetector with a vertical PN space charge region. The photoelectrons generated in the space charge region can be accelerated onto the SnO₂ surface and achieve sensitive spectral response. By varying the thickness of SnO₂, the thickness of the space charge layer in the detector is gradiently modulated. Together with the photo-induced potential from KPFM characterization, the key role of the space charge layer thickness is fully confirmed in performance modulation of devices. The device achieves a maximum responsivity of 0.65 A/W and a quantum efficiency of 94.6 %. More notably, the transient response of the device is below 20 ns, demonstrating the application potential of this structure in photodetectors.

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具有高响应率和纳秒级光响应的si基非晶SnO2垂直异质结光电探测器

光电探测器在光电子通信和其他信息相关领域发挥着至关重要的作用。Si作为可见光探测的重要材料之一，其性能受到吸收系数低等因素的制约，限制了商用光电探测器性能的进一步提高。在这项工作中，我们利用SnO2异质结，制作了一个具有垂直PN空间电荷区的MSM结构光电探测器。在空间电荷区产生的光电子可以被加速到SnO2表面并获得灵敏的光谱响应。通过改变SnO2的厚度，可以对探测器内空间电荷层的厚度进行梯度调制。结合KPFM表征的光致电位，充分证实了空间电荷层厚度在器件性能调制中的关键作用。该器件的最大响应率为0.65 a /W，量子效率为94.6%。更值得注意的是，该器件的瞬态响应低于20 ns，证明了该结构在光电探测器中的应用潜力。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Optics and Laser Technology 物理-光学

CiteScore

8.50

自引率

10.00%

发文量

1060

审稿时长

3.4 months

期刊介绍： Optics & Laser Technology aims to provide a vehicle for the publication of a broad range of high quality research and review papers in those fields of scientific and engineering research appertaining to the development and application of the technology of optics and lasers. Papers describing original work in these areas are submitted to rigorous refereeing prior to acceptance for publication. The scope of Optics & Laser Technology encompasses, but is not restricted to, the following areas: •development in all types of lasers •developments in optoelectronic devices and photonics •developments in new photonics and optical concepts •developments in conventional optics, optical instruments and components •techniques of optical metrology, including interferometry and optical fibre sensors •LIDAR and other non-contact optical measurement techniques, including optical methods in heat and fluid flow •applications of lasers to materials processing, optical NDT display (including holography) and optical communication •research and development in the field of laser safety including studies of hazards resulting from the applications of lasers (laser safety, hazards of laser fume) •developments in optical computing and optical information processing •developments in new optical materials •developments in new optical characterization methods and techniques •developments in quantum optics •developments in light assisted micro and nanofabrication methods and techniques •developments in nanophotonics and biophotonics •developments in imaging processing and systems