Calculation of surface partial intensity distribution with REELS spectra

Abstract

Surface partial intensities have been extracted from reflection electron energy loss spectroscopy spectra based on extended Landau formula with different models of differential surface exciting probability. The obtained results for Al and Si at electron energies of 100–1000 eV show that the partial intensity distribution does not follow Poisson expression: the first and second surface partial intensities play dominant role in surface excitation and the higher surface partial intensities are negligible. Analysis indicates that the multiple inelastic scattering containing single surface excitation and multiple bulk excitations have important contribution to REELS spectra. The dependence of the surface partial intensities on the incident energy and emission angle is also investigated.