A compact UHV negative halogen ion source with narrow energy spread for ion soft-landing study.

IF 1.7 4区工程技术 Q3 INSTRUMENTS & INSTRUMENTATION

Review of Scientific Instruments Pub Date : 2025-09-01 DOI:10.1063/5.0272024

Qiwei Chen, Xianzheng Liu, Yuchen Bai, Liluo He, Zhongyi Wu, Haoyang Deng, Xiong Zhou, Jing Liu, Kai Wu

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引用次数: 0

Abstract

A compact ultrahigh vacuum negative halogen ion source has been developed to generate ion beams with small energy spread for soft-landing applications. Thermionic emission of a halogen atom from a hot tantalum surface carries an extra electron to form a negative halogen ion. Based on this principle, a tantalum helical ionizer is designed to efficiently produce Cl- ions from Cl atoms generated by CuCl2 decomposition. The intrinsic kinetic energy distribution, quantified by a retarding field energy analyzer, exhibits a full width at half maximum of ∼0.83 eV. Beam profiling confirms a controllable diameter within 8 mm. Isotopes of 35Cl- and 37Cl- have been successfully resolved with a Wien filter. The compact ion source has been integrated into an ion transport study apparatus, with initial experiments verifying ion soft-landing and surface charge dynamics. This ion source provides a reliable tool for probing ion-involved interfacial processes under ultra-high vacuum conditions, while advancing ion chemistry and relating sciences as well.

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用于离子软着陆研究的紧凑型窄能量扩散特高压负卤素离子源。

为实现软着陆应用，研制了一种紧凑的超高真空负卤素离子源，产生能量扩散小的离子束。卤素原子从热钽表面的热离子发射携带一个额外的电子，形成负卤素离子。基于这一原理，设计了一种钽螺旋电离器，使CuCl2分解产生的Cl原子高效地产生Cl-离子。本征动能分布，通过减速场能量分析仪量化，显示出一半最大值的全宽度为~ 0.83 eV。光束剖面确认直径在8毫米以内可控。35Cl-和37Cl-的同位素已经用维恩滤光器成功地分离出来。紧凑离子源已集成到离子输运研究装置中，并进行了初步实验验证离子软着陆和表面电荷动力学。该离子源为在超高真空条件下探测离子参与的界面过程提供了可靠的工具，同时也促进了离子化学和相关科学的发展。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Review of Scientific Instruments 工程技术-物理：应用

CiteScore

3.00

自引率

12.50%

发文量

758

审稿时长

2.6 months

期刊介绍： Review of Scientific Instruments, is committed to the publication of advances in scientific instruments, apparatuses, and techniques. RSI seeks to meet the needs of engineers and scientists in physics, chemistry, and the life sciences.