Exploring oxygen pressure effects on phase transitions, ferroelectric properties, and ultrasonic transducer performance in (Ba0.85Ca0.15)(Ti0.9Zr0.1)O3 thin films by pulsed laser deposition

IF 2 4区材料科学 Q3 MATERIALS SCIENCE, COATINGS & FILMS

Thin Solid Films Pub Date : 2025-09-03 DOI:10.1016/j.tsf.2025.140780

E. Benítez-Flores , A. Reyes-Montero , O. Depablos-Rivera , B. Carreño-Jiménez , M. Acuautla , R. Castañeda-Guzmán

{"title":"Exploring oxygen pressure effects on phase transitions, ferroelectric properties, and ultrasonic transducer performance in (Ba0.85Ca0.15)(Ti0.9Zr0.1)O3 thin films by pulsed laser deposition","authors":"E. Benítez-Flores , A. Reyes-Montero , O. Depablos-Rivera , B. Carreño-Jiménez , M. Acuautla , R. Castañeda-Guzmán","doi":"10.1016/j.tsf.2025.140780","DOIUrl":null,"url":null,"abstract":"<div><div>This study investigates the effect of oxygen pressure (P<span><math><msub><mrow></mrow><mrow><msub><mrow><mi>O</mi></mrow><mrow><mn>2</mn></mrow></msub></mrow></msub></math></span>) during pulsed laser deposition on the structural, ferroelectric, and piezoelectric properties of <figure><img></figure> thin films. Films were deposited at P<span><math><msub><mrow></mrow><mrow><msub><mrow><mi>O</mi></mrow><mrow><mn>2</mn></mrow></msub></mrow></msub></math></span> levels of 8.6, 10, 11.5, and 12.7 Pa. The optimal ferroelectric properties were observed at 10 Pa, with a remnant polarization of 2.97 <span><math><mi>μ</mi></math></span>C/cm<sup>2</sup>, a coercive field of 33.80 kV/cm, and a saturation polarization of 11.88 <span><math><mi>μ</mi></math></span>C/cm<sup>2</sup>, closely matching the target composition. X-ray diffraction and Raman spectroscopy confirmed the presence of a morphotropic phase boundary (MPB) near room temperature. The MPB shifts toward lower temperatures with increasing P<span><math><msub><mrow></mrow><mrow><msub><mrow><mi>O</mi></mrow><mrow><mn>2</mn></mrow></msub></mrow></msub></math></span>, as characterized by the photoacoustic technique. Frequency measurements based on photoacoustic and piezoelectric effects demonstrated promising performance for piezoelectric micromachined ultrasonic transducers, with resonance frequencies ranging from 9.5 to 13 MHz.</div></div>","PeriodicalId":23182,"journal":{"name":"Thin Solid Films","volume":"827 ","pages":"Article 140780"},"PeriodicalIF":2.0000,"publicationDate":"2025-09-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Thin Solid Films","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0040609025001798","RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"MATERIALS SCIENCE, COATINGS & FILMS","Score":null,"Total":0}

引用次数: 0

Abstract

This study investigates the effect of oxygen pressure (P

_{O_{2}}

) during pulsed laser deposition on the structural, ferroelectric, and piezoelectric properties of

thin films. Films were deposited at P

_{O_{2}}

levels of 8.6, 10, 11.5, and 12.7 Pa. The optimal ferroelectric properties were observed at 10 Pa, with a remnant polarization of 2.97

μ

C/cm², a coercive field of 33.80 kV/cm, and a saturation polarization of 11.88

μ

C/cm², closely matching the target composition. X-ray diffraction and Raman spectroscopy confirmed the presence of a morphotropic phase boundary (MPB) near room temperature. The MPB shifts toward lower temperatures with increasing P

_{O_{2}}

, as characterized by the photoacoustic technique. Frequency measurements based on photoacoustic and piezoelectric effects demonstrated promising performance for piezoelectric micromachined ultrasonic transducers, with resonance frequencies ranging from 9.5 to 13 MHz.

查看原文本刊更多论文

利用脉冲激光沉积技术研究氧压对（Ba0.85Ca0.15）（Ti0.9Zr0.1）O3薄膜相变、铁电性能和超声换能器性能的影响

本文研究了脉冲激光沉积过程中氧压（PO2）对薄膜结构、铁电性和压电性的影响。在PO2水平8.6、10、11.5和12.7 Pa下沉积薄膜。在10 Pa条件下，铁电性能最佳，残余极化率为2.97 μC/cm2，矫顽力场为33.80 kV/cm，饱和极化率为11.88 μC/cm2，与目标成分基本一致。x射线衍射和拉曼光谱证实在室温附近存在致形相边界（MPB）。MPB随着PO2的增加而向较低的温度移动，这是光声技术的特征。基于光声和压电效应的频率测量表明，压电微机械超声换能器具有良好的性能，谐振频率范围为9.5至13 MHz。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文求助全文

来源期刊

Thin Solid Films 工程技术-材料科学：膜

CiteScore

4.00

自引率

4.80%

发文量

381

审稿时长

7.5 months

期刊介绍： Thin Solid Films is an international journal which serves scientists and engineers working in the fields of thin-film synthesis, characterization, and applications. The field of thin films, which can be defined as the confluence of materials science, surface science, and applied physics, has become an identifiable unified discipline of scientific endeavor.