A Silicon Micromachined Cascaded Singlet Filtenna At 270 GHz

IF 3.9 2区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Transactions on Terahertz Science and Technology Pub Date : 2025-06-11 DOI:10.1109/TTHZ.2025.3578844

Arash Arsanjani;Mohammad Mehrabi Gohari;Behrooz Rezaee;Alireza Madannejad;Oleksandr Glubokov;Reinhard Teschl;Joachim Oberhammer;Wolfgang Bösch

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Abstract

This work presents a filtenna concept based on cascaded singlet filters, which inherits independent controllability of attenuation poles from the filter design and has high stopband performance. Two fourth-order filters with a center frequency of 270 GHz, a 14 GHz bandwidth, and in-band return losses of 15 and 18 dB, respectively, are manufactured and measured to verify the proposed concept. The filtennas with a single-slot configuration and a double-slot configuration are fabricated by the silicon deep reactive ion etching technology and have the size of 3.65 × 2.6 mm². Detailed explanations of the synthesis procedure, which was validated through electromagnetic simulation, and measurement results are provided. The measured single-slot and double-slot filtennas exhibit broadside radiation gains of approximately 4.5 and 6.5 dBi at 270 GHz, respectively. Moreover, the challenges and details of silicon micromachining in fabricating the two filtering antennas are discussed.

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一种270 GHz硅微机械级联单重态滤波器

本文提出了一种基于级联单重态滤波器的滤波器概念，它继承了滤波器设计中衰减极点的独立可控性，并具有高阻带性能。制造了两个中心频率为270ghz、带宽为14ghz、带内回波损耗分别为15db和18db的四阶滤波器，并对其进行了测量以验证所提出的概念。采用硅深反应离子刻蚀技术制备了单槽和双槽两种结构的滤光片，尺寸为3.65 × 2.6 mm2。详细说明了合成过程，并通过电磁仿真验证了合成过程，给出了测量结果。测量的单槽和双槽滤波器在270 GHz时的宽侧辐射增益分别约为4.5和6.5 dBi。此外，还讨论了硅微加工在制备两种滤波天线时所面临的挑战和细节。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

IEEE Transactions on Terahertz Science and Technology ENGINEERING, ELECTRICAL & ELECTRONIC-OPTICS

CiteScore

7.10

自引率

9.40%

发文量

102

期刊介绍： IEEE Transactions on Terahertz Science and Technology focuses on original research on Terahertz theory, techniques, and applications as they relate to components, devices, circuits, and systems involving the generation, transmission, and detection of Terahertz waves.