Lukas M Lienhard, Corey Austin, Weihe Xu, Mourad Idir, Steven Hulbert, Evgeny Nazaretski, D Scott Coburn, Tianyi Wang, Lei Huang
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引用次数: 0
Abstract
Modern synchrotron x-ray beamlines demand reflective optics with higher surface profile accuracy to achieve diffraction-limited focusing. This necessitates advanced metrology instruments capable of delivering repeatable measurements in the nanometer to sub-nanometer range. Slope ranges exceeding 15 mrad (0.86°) and greater pose significant challenges for mirror metrology using conventional interferometric methods. To address this, we present a new relative angle determinable stitching interferometry instrument featuring a parallel flexure-based mechanical design. This approach enhances vibration and thermal stability while maintaining a compact and lightweight system. Initial measurements of a cylindrical mirror with a 16 m radius of curvature and a slope range of 5 mrad demonstrate nanometer-level repeatability. Comprehensive system characterization suggests the potential for achieving sub-nanometer repeatability with further refinement to the instrument.
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Review of Scientific Instruments, is committed to the publication of advances in scientific instruments, apparatuses, and techniques. RSI seeks to meet the needs of engineers and scientists in physics, chemistry, and the life sciences.
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