Impact of the brittle layers on the electrical and mechanical behaviours of 18 nm Ag layers in indium tin oxide-silver stackings

IF 2 4区 材料科学 Q3 MATERIALS SCIENCE, COATINGS & FILMS
T. Chommaux , P. Godard , D. Thiaudière , P.O. Renault
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引用次数: 0

Abstract

The electrical and mechanical properties of indium tin oxide (ITO) and silver (Ag) multilayers deposited on polyimides (PI) are studied. From the electrical point of view, the multilayer performs initially like the Ag layer, as seen in the R-sheet and in the gauge factor, and behaves during biaxial tensile tests according to the mechanical properties of this 18 nm Ag layer. The mechanical properties strongly change for different multilayer architectures. For example, the ITO/Ag/ITO/PI sample shows an elastic regime, whereas plasticity occurs immediately in Ag/ITO/PI, ITO/Ag/PI and Ag/PI samples. Moreover, the Ag layer sustains a stress of almost 500MPa before cracking in the first case, but no more than 200MPa in the second. This shows how the mechanical behaviour of ultra-thin silver layers is dictated by the interfaces, that may be soft (as with air or polyimide) or hard (amorphous or crystalline).
脆性层对氧化铟锡-银叠层中18nm银层电学和力学行为的影响
研究了在聚酰亚胺(PI)上沉积的氧化铟锡(ITO)和银(Ag)多层膜的电学和力学性能。从电学的角度来看,从r片和规格因子中可以看出,多层材料最初的表现与银层相似,并且在双轴拉伸试验期间的表现与该18nm银层的机械性能相似。在不同的多层结构中,力学性能会发生很大的变化。例如,ITO/Ag/ITO/PI样品表现出弹性状态,而Ag/ITO/PI、ITO/Ag/PI和Ag/PI样品则立即出现塑性。在第一种情况下,银层开裂前承受的应力接近500MPa,而在第二种情况下,银层开裂前承受的应力不超过200MPa。这表明超薄银层的机械行为是如何由界面决定的,界面可能是软的(如空气或聚酰亚胺),也可能是硬的(无定形或结晶)。
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来源期刊
Thin Solid Films
Thin Solid Films 工程技术-材料科学:膜
CiteScore
4.00
自引率
4.80%
发文量
381
审稿时长
7.5 months
期刊介绍: Thin Solid Films is an international journal which serves scientists and engineers working in the fields of thin-film synthesis, characterization, and applications. The field of thin films, which can be defined as the confluence of materials science, surface science, and applied physics, has become an identifiable unified discipline of scientific endeavor.
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