Wideband Terahertz Frequency Meter and Power Meter in CMOS

IF 3.9 2区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Transactions on Terahertz Science and Technology Pub Date : 2025-03-16 DOI:10.1109/TTHZ.2025.3571191

Zhao-Yang Liu;Feng Qi;Ye-Long Wang;Peng-Xiang Liu;Wei-Fan Li

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引用次数: 0

Abstract

This article presents a method for designing a compact wideband on-chip terahertz frequency meter and a power meter. The core of this method lies in leveraging two highly correlated terahertz incoherent detectors to create a frequency-dependent and power-independent output ratio, which allows for the precise extraction of frequency information and effectively cancels out common external interference factors, ensuring strong robustness. At a known frequency, the terahertz power can be calculated using the precharacterized voltage responsivity (R_v) and the detector output voltage. The robustness of the method against process, voltage, and temperature variations was analyzed, confirming its strong reliability and practical applicability. The proposed method was validated using a chip containing eight nested detectors fabricated in a 65-nm CMOS process. Frequency measurements demonstrated an accuracy of 1 GHz within the range of 180–500 GHz, and power measurements showed an average deviation of 8.8% across 180–500 GHz compared to a commercial power meter.

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CMOS中的宽带太赫兹频率计和功率计

本文介绍了一种小型宽带片上太赫兹频率计和功率计的设计方法。该方法的核心在于利用两个高度相关的太赫兹非相干探测器，产生频率相关和功率无关的输出比，从而可以精确提取频率信息，并有效抵消常见的外部干扰因素，确保强大的鲁棒性。在已知频率下，可以使用预表征电压响应度（Rv）和检测器输出电压计算太赫兹功率。分析了该方法对工艺、电压和温度变化的鲁棒性，证实了该方法具有较强的可靠性和实用性。采用65纳米CMOS工艺制作的包含8个嵌套探测器的芯片验证了该方法。频率测量显示，在180-500 GHz范围内的精度为1 GHz，功率测量显示，与商用功率计相比，在180-500 GHz范围内的平均偏差为8.8%。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

IEEE Transactions on Terahertz Science and Technology ENGINEERING, ELECTRICAL & ELECTRONIC-OPTICS

CiteScore

7.10

自引率

9.40%

发文量

102

期刊介绍： IEEE Transactions on Terahertz Science and Technology focuses on original research on Terahertz theory, techniques, and applications as they relate to components, devices, circuits, and systems involving the generation, transmission, and detection of Terahertz waves.