Crack propagation in ultrasonic-bonded copper wires investigated by power cycling and accelerated mechanical fatigue interconnection test methods

IF 1.9 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC
L. Karanja , P. Pichon , M. Legros
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引用次数: 0

Abstract

The introduction of robust interconnects such as copper wire and metallization, and silver sinter die technology have significantly increased the reliability of insulated gate bipolar transistor (IGBT) power devices. As a result, the reliability testing duration has increased, and it is particularly challenging to investigate the degradation mechanism in the wire bonds. To shorten the testing time, and to test the failure modes in the wire bonds an isothermal accelerated mechanical fatigue interconnect test has been introduced. This mechanical fatigue test attempts to mimic thermomechanical stresses caused during power cycling. In this work, an in-depth microstructure investigation of the failure mode in copper top interconnects after power cycling and after mechanical fatigue testing was carried out. It was found that the crack propagation path for both tests was similar. The mechanical test is seen to alter the microstructure of the wire bond, particularly around the wire and metallization interface.
采用功率循环和加速机械疲劳互连试验方法研究了超声结合铜线的裂纹扩展
引入坚固的互连,如铜线和金属化,以及银烧结模具技术,大大提高了绝缘栅双极晶体管(IGBT)功率器件的可靠性。因此,可靠性测试的持续时间增加了,研究导线键的退化机制尤其具有挑战性。为了缩短试验时间,测试线键的破坏模式,引入了等温加速机械疲劳互连试验。这种机械疲劳试验试图模拟动力循环过程中产生的热机械应力。在这项工作中,深入研究了铜顶部互连在电源循环和机械疲劳试验后的破坏模式。结果表明,两种试验的裂纹扩展路径相似。力学试验可以改变金属丝结合的微观结构,特别是在金属丝和金属化界面周围。
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来源期刊
Microelectronics Reliability
Microelectronics Reliability 工程技术-工程:电子与电气
CiteScore
3.30
自引率
12.50%
发文量
342
审稿时长
68 days
期刊介绍: Microelectronics Reliability, is dedicated to disseminating the latest research results and related information on the reliability of microelectronic devices, circuits and systems, from materials, process and manufacturing, to design, testing and operation. The coverage of the journal includes the following topics: measurement, understanding and analysis; evaluation and prediction; modelling and simulation; methodologies and mitigation. Papers which combine reliability with other important areas of microelectronics engineering, such as design, fabrication, integration, testing, and field operation will also be welcome, and practical papers reporting case studies in the field and specific application domains are particularly encouraged. Most accepted papers will be published as Research Papers, describing significant advances and completed work. Papers reviewing important developing topics of general interest may be accepted for publication as Review Papers. Urgent communications of a more preliminary nature and short reports on completed practical work of current interest may be considered for publication as Research Notes. All contributions are subject to peer review by leading experts in the field.
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