Reading reliability analysis and modeling in 1S1R devices based on Phase-Change Memory and Ovonic Threshold Switching selector integrated in a double-patterned self-aligned structure
IF 1.9 4区 工程技术Q3 ENGINEERING, ELECTRICAL & ELECTRONIC
Renzo Antonelli , C. De Camaret , G. Bourgeois , Z. Saghi , T. Monniez , S. Martin , N. Castellani , M. Bernard , L. Fellouh , A. Salvi , S. Gout , F. Andrieu , A. Souifi , G. Navarro
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引用次数: 0
Abstract
This study investigates the impact and the reliability of the reading operation in one-selector one-resistor (1S1R) memory devices based on an Ovonic Threshold Switching (OTS) selector and Phase Change Memory (PCM) co-integrated in a Double-Patterned Self-Aligned (DPSA) structure targeting Crossbar applications. Upon reading, the SET state can face a threshold voltage (Vth) increase of more than 20% depending on the reading current and on the number of reading operations, which can lead to a bit-flip soft failure. We isolate the contributions to this increase coming respectively from the OTS and the PCM, providing an assessment protocol for the reading reliability. We model the evolution of the Vth, which allow us to extract the performance metrics such as the read window margin (RWM), the reading-cycles-to-failure, and the maximum Crossbar array size. Finally, we present the SET and RESET threshold voltage distributions before and after the reading operation.
期刊介绍:
Microelectronics Reliability, is dedicated to disseminating the latest research results and related information on the reliability of microelectronic devices, circuits and systems, from materials, process and manufacturing, to design, testing and operation. The coverage of the journal includes the following topics: measurement, understanding and analysis; evaluation and prediction; modelling and simulation; methodologies and mitigation. Papers which combine reliability with other important areas of microelectronics engineering, such as design, fabrication, integration, testing, and field operation will also be welcome, and practical papers reporting case studies in the field and specific application domains are particularly encouraged.
Most accepted papers will be published as Research Papers, describing significant advances and completed work. Papers reviewing important developing topics of general interest may be accepted for publication as Review Papers. Urgent communications of a more preliminary nature and short reports on completed practical work of current interest may be considered for publication as Research Notes. All contributions are subject to peer review by leading experts in the field.