{"title":"Two 7–13-GHz GaAs-SiGe Four–Channel Beamforming Chiplets With/Without Metallic Interlayer Shields","authors":"Nengxu Zhu;Yiting Zhang;Genyin Ma;Fanyi Meng","doi":"10.1109/LSSC.2025.3573757","DOIUrl":null,"url":null,"abstract":"This letter presents two 7–13-GHz GaAs-SiGe four-channel beamforming chiplets to minimize the chip area. The chips integrate GaAs-based power amplifiers (PAs) and low-noise amplifiers (LNAs) with silicon-based phase and amplitude control modules using gold bumps. To mitigate coupling between the metal patterns of the heterogeneous chips and avoid interference with beamforming performance, a metallic interlayer shield is introduced at the interface. This shield ensures effective integration and preserves the functionality and performance of both the compound and silicon-based components. The fabricated four-channel 3-D heterogeneous integrated radio-frequency front-end chips, using 0.25-<inline-formula> <tex-math>$\\mu $ </tex-math></inline-formula>m GaAs and 0.13-<inline-formula> <tex-math>$\\mu $ </tex-math></inline-formula>m SiGe BiCMOS processes, achieve 6-bit amplitude/phase control with 0.5 dB/5.625° resolution with power consumption of 3.6 W (TX) and 1.6 W (RX). The RMS amplitude and phase errors are <0.6> <tex-math>$\\mathrm { OP_{1dB}}$ </tex-math></inline-formula> and −1.5-dBm RX IP1dB, with a compact total area of <inline-formula> <tex-math>$4.1\\times 3.05$ </tex-math></inline-formula> mm2.","PeriodicalId":13032,"journal":{"name":"IEEE Solid-State Circuits Letters","volume":"8 ","pages":"161-164"},"PeriodicalIF":2.0000,"publicationDate":"2025-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Solid-State Circuits Letters","FirstCategoryId":"1085","ListUrlMain":"https://ieeexplore.ieee.org/document/11015932/","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"COMPUTER SCIENCE, HARDWARE & ARCHITECTURE","Score":null,"Total":0}
引用次数: 0
Abstract
This letter presents two 7–13-GHz GaAs-SiGe four-channel beamforming chiplets to minimize the chip area. The chips integrate GaAs-based power amplifiers (PAs) and low-noise amplifiers (LNAs) with silicon-based phase and amplitude control modules using gold bumps. To mitigate coupling between the metal patterns of the heterogeneous chips and avoid interference with beamforming performance, a metallic interlayer shield is introduced at the interface. This shield ensures effective integration and preserves the functionality and performance of both the compound and silicon-based components. The fabricated four-channel 3-D heterogeneous integrated radio-frequency front-end chips, using 0.25-$\mu $ m GaAs and 0.13-$\mu $ m SiGe BiCMOS processes, achieve 6-bit amplitude/phase control with 0.5 dB/5.625° resolution with power consumption of 3.6 W (TX) and 1.6 W (RX). The RMS amplitude and phase errors are <0.6> $\mathrm { OP_{1dB}}$ and −1.5-dBm RX IP1dB, with a compact total area of $4.1\times 3.05$ mm2.