{"title":"Impact of Pulse Voltage Stress on the Reliability of Ferroelectric Thin-Film Transistor","authors":"William Cheng-Yu Ma;Chun-Jung Su;Kuo-Hsing Kao;Yu-Chieh Yen;Ji-Min Yang;Yi-Han Li;Yen-Chen Chen;Jhe-Yu Lin;Hui-Wen Chang","doi":"10.1109/TDMR.2025.3548038","DOIUrl":null,"url":null,"abstract":"Ferroelectric transistors can function as non-volatile memory devices with single-bit, multi-bit, and analog capabilities. State modulation is achieved by programming and erasing with bipolar pulse voltages, while a series of unipolar pulses enable synaptic potentiation and depression. This study examines the effect of pulse voltage stress on the reliability of ferroelectric thin-film transistors (FeTFT) with polycrystalline-silicon (poly-Si) ultra-thin body (UTB) channels. By applying various pulse stresses—bipolar, positive, and negative unipolar—with different pulse widths, we observed distinct degradation behaviors in UTB-FeTFT characteristics. Long bipolar pulse stress caused significant degradation due to the combined effects of the internal electric field from the ferroelectric layer and the external field. In contrast, short bipolar stress led to milder degradation, as lower remnant polarization reduced the total stress field. Rapid changes in electric field direction also limited charge accumulation in the channel, decreasing interface trap generation. Although short bipolar stress had minimal impact on subthreshold swing, it notably degraded maximum transconductance, primarily due to strain in the poly-Si channel’s atomic bonds. Enhancing device reliability is essential for improving FeTFT endurance.","PeriodicalId":448,"journal":{"name":"IEEE Transactions on Device and Materials Reliability","volume":"25 2","pages":"240-246"},"PeriodicalIF":2.3000,"publicationDate":"2025-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Transactions on Device and Materials Reliability","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/10912724/","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
Ferroelectric transistors can function as non-volatile memory devices with single-bit, multi-bit, and analog capabilities. State modulation is achieved by programming and erasing with bipolar pulse voltages, while a series of unipolar pulses enable synaptic potentiation and depression. This study examines the effect of pulse voltage stress on the reliability of ferroelectric thin-film transistors (FeTFT) with polycrystalline-silicon (poly-Si) ultra-thin body (UTB) channels. By applying various pulse stresses—bipolar, positive, and negative unipolar—with different pulse widths, we observed distinct degradation behaviors in UTB-FeTFT characteristics. Long bipolar pulse stress caused significant degradation due to the combined effects of the internal electric field from the ferroelectric layer and the external field. In contrast, short bipolar stress led to milder degradation, as lower remnant polarization reduced the total stress field. Rapid changes in electric field direction also limited charge accumulation in the channel, decreasing interface trap generation. Although short bipolar stress had minimal impact on subthreshold swing, it notably degraded maximum transconductance, primarily due to strain in the poly-Si channel’s atomic bonds. Enhancing device reliability is essential for improving FeTFT endurance.
期刊介绍:
The scope of the publication includes, but is not limited to Reliability of: Devices, Materials, Processes, Interfaces, Integrated Microsystems (including MEMS & Sensors), Transistors, Technology (CMOS, BiCMOS, etc.), Integrated Circuits (IC, SSI, MSI, LSI, ULSI, ELSI, etc.), Thin Film Transistor Applications. The measurement and understanding of the reliability of such entities at each phase, from the concept stage through research and development and into manufacturing scale-up, provides the overall database on the reliability of the devices, materials, processes, package and other necessities for the successful introduction of a product to market. This reliability database is the foundation for a quality product, which meets customer expectation. A product so developed has high reliability. High quality will be achieved because product weaknesses will have been found (root cause analysis) and designed out of the final product. This process of ever increasing reliability and quality will result in a superior product. In the end, reliability and quality are not one thing; but in a sense everything, which can be or has to be done to guarantee that the product successfully performs in the field under customer conditions. Our goal is to capture these advances. An additional objective is to focus cross fertilized communication in the state of the art of reliability of electronic materials and devices and provide fundamental understanding of basic phenomena that affect reliability. In addition, the publication is a forum for interdisciplinary studies on reliability. An overall goal is to provide leading edge/state of the art information, which is critically relevant to the creation of reliable products.