Color polarization confocal measurement method based on ring-shaped structured light

IF 4.6 2区物理与天体物理 Q1 OPTICS

Optics and Laser Technology Pub Date : 2025-06-09 DOI:10.1016/j.optlastec.2025.113315

Wenyuan Zhou , Yujia Sun , Zhaowu Liu , Wei Wang , Weicheng Wang , Wenhao Li

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引用次数: 0

Abstract

Color confocal displacement measurement (CCM) is a noncontact optical measurement method widely used for nondestructive testing of object surface contours, but the rapid development of manufacturing technologies has imposed stricter requirements on CCM, including integration, higher precision, and higher measurement speeds. Traditional refractive CCM structures are bulky and cannot be integrated, whereas diffractive CCM structures hinder high-speed measurements because of nonlinear dispersion. This article proposes a color polarization confocal measurement method based on ring-shaped structured light (CCRSL), combining binary optics with polarization to achieve integration and high-speed measurements. In addition, two axicon lenses are used to generate ring-shaped structured light and eliminate optical energy loss in the polarization folding system. Modeling is conducted using ZEMAX software and numerical analysis methods to simulate and analyze the CCRSL performance. The resulting linear determination coefficient R² is 1, the measurement range is 2 mm, the measurement precision is 0.29 um, and the resolution reaches 80 nm. Compared with the traditional method, the length of CCRSL is reduced by 72 % and the resolution is increased by 2.5 times.

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基于环形结构光的彩色偏振共聚焦测量方法

彩色共焦位移测量（CCM）是一种广泛用于物体表面轮廓无损检测的非接触式光学测量方法，但制造技术的快速发展对CCM提出了更严格的要求，包括集成度、精度和测量速度。传统的折射率CCM结构体积庞大且无法集成，而衍射CCM结构由于非线性色散阻碍了高速测量。本文提出了一种基于环形结构光（CCRSL）的彩色偏振共聚焦测量方法，将二元光学与偏振相结合，实现了集成化和高速测量。另外，利用两个轴突透镜产生环形结构光，消除偏振折叠系统中的光能损失。利用ZEMAX软件和数值分析方法进行建模，对CCRSL的性能进行仿真分析。所得线性测定系数R2为1，测量范围为2 mm，测量精度为0.29 um，分辨率达到80 nm。与传统方法相比，CCRSL的长度缩短72%，分辨率提高2.5倍。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Optics and Laser Technology 物理-光学

CiteScore

8.50

自引率

10.00%

发文量

1060

审稿时长

3.4 months

期刊介绍： Optics & Laser Technology aims to provide a vehicle for the publication of a broad range of high quality research and review papers in those fields of scientific and engineering research appertaining to the development and application of the technology of optics and lasers. Papers describing original work in these areas are submitted to rigorous refereeing prior to acceptance for publication. The scope of Optics & Laser Technology encompasses, but is not restricted to, the following areas: •development in all types of lasers •developments in optoelectronic devices and photonics •developments in new photonics and optical concepts •developments in conventional optics, optical instruments and components •techniques of optical metrology, including interferometry and optical fibre sensors •LIDAR and other non-contact optical measurement techniques, including optical methods in heat and fluid flow •applications of lasers to materials processing, optical NDT display (including holography) and optical communication •research and development in the field of laser safety including studies of hazards resulting from the applications of lasers (laser safety, hazards of laser fume) •developments in optical computing and optical information processing •developments in new optical materials •developments in new optical characterization methods and techniques •developments in quantum optics •developments in light assisted micro and nanofabrication methods and techniques •developments in nanophotonics and biophotonics •developments in imaging processing and systems