Robust Performance Under Ball Drop on Coplanar Oxide TFT by Organic Passivation Layer on Top

IF 2.9 2区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Transactions on Electron Devices Pub Date : 2025-04-24 DOI:10.1109/TED.2025.3558770

Junmi Lee;Heonbang Lee;Myeonggi Jeong;Jinbaek Bae;Chanju Park;Keunwoo Kim;Jin Jang

引用次数: 0

Abstract

We report the effect of the ball drop on coplanar oxide thin-film transistors (TFTs) on polyimide (PI) substrate. The ball drop tests were carried out on the TFTs without and with an organic passivation layer (OPL) as a function of drop number. The oxide TFTs without an OPL show electrical degradation by ball drop impact. However, the performance of the TFTs with an OPL changes a little even after 10 times of ball drops on top. It is also found that the splitting of the active layer is more robust under the ball drop test. The performance degradation is mainly due to the O vacancy increase in the channel and the crack formation on the TFTs after the ball drop. It is concluded that splitting the active layer of the coplanar TFT with OPL on top TFT shows no change in electrical performance after many times of ball drops.

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顶部有机钝化层的共面氧化TFT在球落下的稳健性能

本文报道了球落对聚酰亚胺（PI）衬底上共面氧化薄膜晶体管（TFTs）的影响。对无有机钝化层（OPL）和有有机钝化层（OPL）的tft进行了球滴试验。没有OPL的氧化物tft在球落冲击下表现出电退化。然而，带有OPL的tft即使在10次球落在顶部后性能也略有变化。还发现，在球落试验下，活性层的劈裂更为稳健。性能下降的主要原因是通道中O空位的增加和落球后tft表面裂纹的形成。结果表明，将共面TFT的有源层与OPL分开后，多次球落后电学性能没有变化。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

IEEE Transactions on Electron Devices 工程技术-工程：电子与电气

CiteScore

5.80

自引率

16.10%

发文量

937

审稿时长

3.8 months

期刊介绍： IEEE Transactions on Electron Devices publishes original and significant contributions relating to the theory, modeling, design, performance and reliability of electron and ion integrated circuit devices and interconnects, involving insulators, metals, organic materials, micro-plasmas, semiconductors, quantum-effect structures, vacuum devices, and emerging materials with applications in bioelectronics, biomedical electronics, computation, communications, displays, microelectromechanics, imaging, micro-actuators, nanoelectronics, optoelectronics, photovoltaics, power ICs and micro-sensors. Tutorial and review papers on these subjects are also published and occasional special issues appear to present a collection of papers which treat particular areas in more depth and breadth.