Ultra-Low Accelerating Voltage Scanning Electron Microscopy with Multiple Imaging Detectors.

Abstract

This paper describes the positioning of the ultra-low accelerating voltage scanning electron microscope (ULV-SEM) equipped with multiple imaging detectors in the history of SEM development. ULV-SEM provides rich information once the user finds the "sweet spot" for both secondary electron and backscattered electron images based on an understanding of the signal acceptance of the instrument. Use of multiple imaging detectors allows acquisition of various images with a single scan. X-ray microanalysis under the same experimental conditions as the observation "sweet spot" has become possible with a windowless X-ray spectrometer optimized for use at a short working distance.