{"title":"High energy-resolution soft X-ray emission spectrometer using a back-thinned CMOS detector for chemical bonding state analysis.","authors":"Shogo Koshiya, Takanori Murano, Masami Terauchi","doi":"10.1093/jmicro/dfaf021","DOIUrl":null,"url":null,"abstract":"<p><p>Improvement of a commercially available soft X-ray emission spectrometer was tested by introducing a fine-pixel-sized CMOS detector. The peak width of Mg Kα-emission was reduced to 1/4 of that obtained by the CCD detector presently used. Furthermore, the differences in the energy positions of satellite lines of Mg Kα- and also Kβ-emission profiles of Mg and MgO were observed. O K-emission profile of MgO exhibited a few structures reflecting the chemical bonding state. This spectrometer easily discriminated the intensity profiles of Fe Lα,β-emission reflecting the chemical bonding states of Fe atoms in Fe, FeO, Fe3O4, and Fe2O3.</p>","PeriodicalId":74193,"journal":{"name":"Microscopy (Oxford, England)","volume":" ","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2025-04-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microscopy (Oxford, England)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1093/jmicro/dfaf021","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
Improvement of a commercially available soft X-ray emission spectrometer was tested by introducing a fine-pixel-sized CMOS detector. The peak width of Mg Kα-emission was reduced to 1/4 of that obtained by the CCD detector presently used. Furthermore, the differences in the energy positions of satellite lines of Mg Kα- and also Kβ-emission profiles of Mg and MgO were observed. O K-emission profile of MgO exhibited a few structures reflecting the chemical bonding state. This spectrometer easily discriminated the intensity profiles of Fe Lα,β-emission reflecting the chemical bonding states of Fe atoms in Fe, FeO, Fe3O4, and Fe2O3.
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