Yue Zhang , Xinxi Li , Qian Qiu , Zhong Zhang , Bo Dai , Yong Ren
{"title":"Interfacial roughness study of N2 reactive sputtered Ti/Ni neutron supermirrors by neutron reflection technique","authors":"Yue Zhang , Xinxi Li , Qian Qiu , Zhong Zhang , Bo Dai , Yong Ren","doi":"10.1016/j.tsf.2025.140690","DOIUrl":null,"url":null,"abstract":"<div><div>Neutron supermirror is an important neutron optics component which uses the total reflection principle to transport neutron beams. The formation of interface intermetallics and interface roughness with total multilayer thickness limit the neutron reflectivity performance of Ti/Ni multilayers. The interface roughness of multilayer film was optimized by adjusting the ratio of N<sub>2</sub> when sputtering the Ni layers, which ultimately guided the preparation of Ti/Ni neutron supermirrors with improved reflectivity. Direct current reactive magnetron sputtered samples were prepared with different N<sub>2</sub> ratios. And the surface morphology was studied by atomic force microscope (AFM), which revealed that 10 % N<sub>2</sub> inhibited the roughness growth of film by refining grains. The results of interfacial structure observed by neutron reflectivity were consistent with the AFM, that the average interfacial roughness of the film was minimized at 10 % N<sub>2</sub> ratio. The magnetization strength measured by vibrating sample magnetometer was affected by the number of bilayers and the N<sub>2</sub> ratio of the magnetic material. Finally, the Ni layers were sputtered with 10 % ratio of N<sub>2</sub>, which resulted in a 2.7 % reflectivity enhancement compared to m = 2 Ti/Ni supermirror with pure Ar in the q range of 0.03–0.04 Å<sup>-1</sup>.</div></div>","PeriodicalId":23182,"journal":{"name":"Thin Solid Films","volume":"821 ","pages":"Article 140690"},"PeriodicalIF":2.0000,"publicationDate":"2025-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Thin Solid Films","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0040609025000902","RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"MATERIALS SCIENCE, COATINGS & FILMS","Score":null,"Total":0}
引用次数: 0
Abstract
Neutron supermirror is an important neutron optics component which uses the total reflection principle to transport neutron beams. The formation of interface intermetallics and interface roughness with total multilayer thickness limit the neutron reflectivity performance of Ti/Ni multilayers. The interface roughness of multilayer film was optimized by adjusting the ratio of N2 when sputtering the Ni layers, which ultimately guided the preparation of Ti/Ni neutron supermirrors with improved reflectivity. Direct current reactive magnetron sputtered samples were prepared with different N2 ratios. And the surface morphology was studied by atomic force microscope (AFM), which revealed that 10 % N2 inhibited the roughness growth of film by refining grains. The results of interfacial structure observed by neutron reflectivity were consistent with the AFM, that the average interfacial roughness of the film was minimized at 10 % N2 ratio. The magnetization strength measured by vibrating sample magnetometer was affected by the number of bilayers and the N2 ratio of the magnetic material. Finally, the Ni layers were sputtered with 10 % ratio of N2, which resulted in a 2.7 % reflectivity enhancement compared to m = 2 Ti/Ni supermirror with pure Ar in the q range of 0.03–0.04 Å-1.
期刊介绍:
Thin Solid Films is an international journal which serves scientists and engineers working in the fields of thin-film synthesis, characterization, and applications. The field of thin films, which can be defined as the confluence of materials science, surface science, and applied physics, has become an identifiable unified discipline of scientific endeavor.