Development of a 10–50-W Plasma Jet at 10 GHz

Abstract

This article presents the design, development, and characterization of a plasma jet operating at 10 GHz, covering input power levels from 10 to 50 W. This work builds upon an established microwave plasma device development workflow, adapted for higher frequencies, and demonstrates its feasibility at four times the conventional frequency (2.45 GHz). Utilizing novel Hot-S measuring equipment spanning from 6 to 18 GHz, this article showcases the benefits of operating at higher frequencies. A compact plasma formation with minimal spatial expansion is observed that scales linearly with frequency above the plasma frequency, indicating improved efficiency and control over the plasma jet’s behavior. The length of the plasma increases by approximately 0.6 times relative to input power, while the width remains almost constant, suggesting optimal performance across the studied power range. Furthermore, temperature measurements using a ceramic cannula provide the temperature generated by the plasma.