J. Theocharis , J.P. Martins , A. Mahjoub , E. Eustache , A. Ziaei , G. Papaioannou
{"title":"On the electrical properties of ALD HfO2 dielectric films for MEMS capacitive switches","authors":"J. Theocharis , J.P. Martins , A. Mahjoub , E. Eustache , A. Ziaei , G. Papaioannou","doi":"10.1016/j.microrel.2025.115737","DOIUrl":null,"url":null,"abstract":"<div><div>This work investigates the electrical properties of thin HfO<sub>2</sub> dielectric films grown by Atomic Layer Deposition (ALD) for application in RF-MEMS capacitive switches. The motivation arises from the need to optimize dielectric performance in these devices, particularly concerning dielectric charging, breakdown behavior, and conduction mechanisms. A key challenge addressed is the influence of deposition temperature on the structural and electrical behavior of the films, which transitions from amorphous to polycrystalline with temperature. The study utilizes a wide range of techniques including current-voltage measurements, impedance spectroscopy, Kelvin Probe potential decay, and Thermally Stimulated Depolarization Currents (TSDC) on Metal–Insulator-Metal (MIM) devices. The key findings indicate that grain boundary formation in polycrystalline films significantly alters the breakdown voltage, charge transport, and trapping mechanisms. It is worth noting that, films deposited at 100–150 °C exhibit hopping conduction and lower leakage, while those at 200–250 °C demonstrate ohmic or Space Charge Limited Current (SCLC) behavior due to crystallization. These results provide insight for selecting suitable deposition parameters to engineer dielectric materials for reliable MEMS switch operation.</div></div>","PeriodicalId":51131,"journal":{"name":"Microelectronics Reliability","volume":"169 ","pages":"Article 115737"},"PeriodicalIF":1.6000,"publicationDate":"2025-04-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microelectronics Reliability","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0026271425001507","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
This work investigates the electrical properties of thin HfO2 dielectric films grown by Atomic Layer Deposition (ALD) for application in RF-MEMS capacitive switches. The motivation arises from the need to optimize dielectric performance in these devices, particularly concerning dielectric charging, breakdown behavior, and conduction mechanisms. A key challenge addressed is the influence of deposition temperature on the structural and electrical behavior of the films, which transitions from amorphous to polycrystalline with temperature. The study utilizes a wide range of techniques including current-voltage measurements, impedance spectroscopy, Kelvin Probe potential decay, and Thermally Stimulated Depolarization Currents (TSDC) on Metal–Insulator-Metal (MIM) devices. The key findings indicate that grain boundary formation in polycrystalline films significantly alters the breakdown voltage, charge transport, and trapping mechanisms. It is worth noting that, films deposited at 100–150 °C exhibit hopping conduction and lower leakage, while those at 200–250 °C demonstrate ohmic or Space Charge Limited Current (SCLC) behavior due to crystallization. These results provide insight for selecting suitable deposition parameters to engineer dielectric materials for reliable MEMS switch operation.
期刊介绍:
Microelectronics Reliability, is dedicated to disseminating the latest research results and related information on the reliability of microelectronic devices, circuits and systems, from materials, process and manufacturing, to design, testing and operation. The coverage of the journal includes the following topics: measurement, understanding and analysis; evaluation and prediction; modelling and simulation; methodologies and mitigation. Papers which combine reliability with other important areas of microelectronics engineering, such as design, fabrication, integration, testing, and field operation will also be welcome, and practical papers reporting case studies in the field and specific application domains are particularly encouraged.
Most accepted papers will be published as Research Papers, describing significant advances and completed work. Papers reviewing important developing topics of general interest may be accepted for publication as Review Papers. Urgent communications of a more preliminary nature and short reports on completed practical work of current interest may be considered for publication as Research Notes. All contributions are subject to peer review by leading experts in the field.