Savannah R. Eisner;Yi-Chen Liu;Jared Naphy;Ruiqi Chen;Mina Rais-Zadeh;Debbie G. Senesky
{"title":"Investigation of InAlN/GaN Circular Transistors for Venus and Other High-Temperature Applications","authors":"Savannah R. Eisner;Yi-Chen Liu;Jared Naphy;Ruiqi Chen;Mina Rais-Zadeh;Debbie G. Senesky","doi":"10.1109/TED.2025.3544181","DOIUrl":null,"url":null,"abstract":"This study examines the performance and long-term reliability of depletion-mode In0.18Al0.82/GaN-on-Si circular high electron mobility transistors (C-HEMTs) in high-temperature environments. Transistors were operated at 472 °C in air and 465 °C under simulated Venus conditions (supercritical CO2, 1348 psi) over 5 days. During heating, a reduction in maximum drain current (I<inline-formula> <tex-math>$_{\\textit {D}\\text {,max}}$ </tex-math></inline-formula>) and a positive threshold voltage (VTH) shift are observed in both air and Venus surface conditions. The <sc>ON</small>/<sc>OFF</small> current ratio (I<inline-formula> <tex-math>$_{\\text {ON} }$ </tex-math></inline-formula>/I<inline-formula> <tex-math>$_{\\text {OFF} }$ </tex-math></inline-formula>) and <sc>OFF</small>-state gate leakage current (I<inline-formula> <tex-math>$_{\\textit {G} {, \\text {OFF}}}$ </tex-math></inline-formula>) exhibit unique trends during heating depending on the ambient, yet values upon reaching nominal 468 °C are similar. During the 5-day operation at high-temperature in air, the Mo/Au gate contact demonstrated robust performance with 9% I<inline-formula> <tex-math>$_{\\textit {D}\\text {,max}}$ </tex-math></inline-formula> reduction and 3% VTH shift. I<inline-formula> <tex-math>$_{\\text {ON} }$ </tex-math></inline-formula>/I<inline-formula> <tex-math>$_{\\text {OFF} }$ </tex-math></inline-formula> improved by 8%, and I<inline-formula> <tex-math>$_{\\textit {G} {, \\text {OFF}}}$ </tex-math></inline-formula> decreased by 38%. In comparison, device degradation was more significant in supercritical CO2, where the increased permeability affected the <sc>OFF</small>-state current. The C-HEMT operated in situ Venus surface conditions exhibited 11% reduction in I<inline-formula> <tex-math>$_{\\textit {D}\\text {,max}}$ </tex-math></inline-formula>, 7% VTH shift, 30% reduction in I<inline-formula> <tex-math>$_{\\text {ON} }$ </tex-math></inline-formula>/I<inline-formula> <tex-math>$_{\\text {OFF} }$ </tex-math></inline-formula>, and 23% reduction in I<inline-formula> <tex-math>$_{\\textit {G} {, \\text {OFF}}}$ </tex-math></inline-formula>. Correlation between electrical performance shifts and surface morphology changes, as observed through scanning electron microscopy (SEM) and atomic force microscopy (AFM), provides deeper insights into degradation mechanisms. Despite this, the transistors showed remarkable resilience, and their wide range of available bias points ensures versatile operation for circuit-level implementations in extreme conditions. These findings underscore the suitability of InAlN/GaN HEMTs for uncooled, high-temperature applications without hermetic sealing.","PeriodicalId":13092,"journal":{"name":"IEEE Transactions on Electron Devices","volume":"72 4","pages":"1674-1681"},"PeriodicalIF":2.9000,"publicationDate":"2025-03-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Transactions on Electron Devices","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/10919467/","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
This study examines the performance and long-term reliability of depletion-mode In0.18Al0.82/GaN-on-Si circular high electron mobility transistors (C-HEMTs) in high-temperature environments. Transistors were operated at 472 °C in air and 465 °C under simulated Venus conditions (supercritical CO2, 1348 psi) over 5 days. During heating, a reduction in maximum drain current (I$_{\textit {D}\text {,max}}$ ) and a positive threshold voltage (VTH) shift are observed in both air and Venus surface conditions. The ON/OFF current ratio (I$_{\text {ON} }$ /I$_{\text {OFF} }$ ) and OFF-state gate leakage current (I$_{\textit {G} {, \text {OFF}}}$ ) exhibit unique trends during heating depending on the ambient, yet values upon reaching nominal 468 °C are similar. During the 5-day operation at high-temperature in air, the Mo/Au gate contact demonstrated robust performance with 9% I$_{\textit {D}\text {,max}}$ reduction and 3% VTH shift. I$_{\text {ON} }$ /I$_{\text {OFF} }$ improved by 8%, and I$_{\textit {G} {, \text {OFF}}}$ decreased by 38%. In comparison, device degradation was more significant in supercritical CO2, where the increased permeability affected the OFF-state current. The C-HEMT operated in situ Venus surface conditions exhibited 11% reduction in I$_{\textit {D}\text {,max}}$ , 7% VTH shift, 30% reduction in I$_{\text {ON} }$ /I$_{\text {OFF} }$ , and 23% reduction in I$_{\textit {G} {, \text {OFF}}}$ . Correlation between electrical performance shifts and surface morphology changes, as observed through scanning electron microscopy (SEM) and atomic force microscopy (AFM), provides deeper insights into degradation mechanisms. Despite this, the transistors showed remarkable resilience, and their wide range of available bias points ensures versatile operation for circuit-level implementations in extreme conditions. These findings underscore the suitability of InAlN/GaN HEMTs for uncooled, high-temperature applications without hermetic sealing.
期刊介绍:
IEEE Transactions on Electron Devices publishes original and significant contributions relating to the theory, modeling, design, performance and reliability of electron and ion integrated circuit devices and interconnects, involving insulators, metals, organic materials, micro-plasmas, semiconductors, quantum-effect structures, vacuum devices, and emerging materials with applications in bioelectronics, biomedical electronics, computation, communications, displays, microelectromechanics, imaging, micro-actuators, nanoelectronics, optoelectronics, photovoltaics, power ICs and micro-sensors. Tutorial and review papers on these subjects are also published and occasional special issues appear to present a collection of papers which treat particular areas in more depth and breadth.