{"title":"AlScN Ferroelectric Diode Enabled CAM With 4F² Cell Size and Low Thermal Budget (330 °C)","authors":"Wenxin Sun;Xiao Kou;Jiuren Zhou;Siying Zheng;Jiawei Li;Danyang Yao;Bochang Li;Tao Wu;Yan Liu;Yue Hao;Genquan Han","doi":"10.1109/LED.2025.3538669","DOIUrl":null,"url":null,"abstract":"In pursuit of high-density three-dimensional integrated content addressable memories (CAMs), we experimentally reported the single AlScN ferroelectric diode-enabled CAM, having an ultra-compact cell size of 4 F2 and a low thermal budget of 330 °C. This is realized by implementing one resistor (1R)-architecture cell design coupled with utilization of emerging ferroelectric AlScN. Such an easily implementable yet highly effective approach for high-density integrated CAMs holds significant promise for propelling forthcoming data-intensive applications forward.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"46 4","pages":"568-571"},"PeriodicalIF":4.1000,"publicationDate":"2025-02-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Electron Device Letters","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/10870266/","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
In pursuit of high-density three-dimensional integrated content addressable memories (CAMs), we experimentally reported the single AlScN ferroelectric diode-enabled CAM, having an ultra-compact cell size of 4 F2 and a low thermal budget of 330 °C. This is realized by implementing one resistor (1R)-architecture cell design coupled with utilization of emerging ferroelectric AlScN. Such an easily implementable yet highly effective approach for high-density integrated CAMs holds significant promise for propelling forthcoming data-intensive applications forward.
期刊介绍:
IEEE Electron Device Letters publishes original and significant contributions relating to the theory, modeling, design, performance and reliability of electron and ion integrated circuit devices and interconnects, involving insulators, metals, organic materials, micro-plasmas, semiconductors, quantum-effect structures, vacuum devices, and emerging materials with applications in bioelectronics, biomedical electronics, computation, communications, displays, microelectromechanics, imaging, micro-actuators, nanoelectronics, optoelectronics, photovoltaics, power ICs and micro-sensors.