{"title":"Demonstration of 4H-SiC Charge Balance Floating Junction Barrier Schottky Diode With High Baliga Figure of Merit","authors":"Jingyu Li;Qingwen Song;Hao Yuan;Fengyu Du;Haobo Kang;Tianyu Shu;Yu Zhou;Chao Han;Xiaoyan Tang;Yuming Zhang","doi":"10.1109/LED.2025.3535678","DOIUrl":null,"url":null,"abstract":"Lower specific on-resistance (Ron,sp) and higher breakdown voltage (BV) are the primary goals of silicon carbide (SiC) power devices. This letter establishes a multi-layer floating junction device model based on charge balance theory and presents an optimized 4H-SiC floating junction Schottky barrier diode (CB-FJJBS) verified through experiments. With the utilization of charge balance theory, the device achieves a more balanced electric field(EF) distribution, thereby enhancing its breakdown characteristics. Notably, the device exhibits a Baliga figure of merit (BFOM, i.e., 4V<inline-formula> <tex-math>${_{\\text {B}}} {^{{2}}}$ </tex-math></inline-formula>/Ron,sp) of 12.1 GW/cm2, a Ron,sp of <inline-formula> <tex-math>${\\mathrm {4.9~\\text {m}\\Omega }} \\cdot $ </tex-math></inline-formula> cm2 and a BV of 3.85 kV, representing the best performance among reported SiC floating junction (FJ) devices.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"46 4","pages":"640-643"},"PeriodicalIF":4.1000,"publicationDate":"2025-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Electron Device Letters","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/10855836/","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
Lower specific on-resistance (Ron,sp) and higher breakdown voltage (BV) are the primary goals of silicon carbide (SiC) power devices. This letter establishes a multi-layer floating junction device model based on charge balance theory and presents an optimized 4H-SiC floating junction Schottky barrier diode (CB-FJJBS) verified through experiments. With the utilization of charge balance theory, the device achieves a more balanced electric field(EF) distribution, thereby enhancing its breakdown characteristics. Notably, the device exhibits a Baliga figure of merit (BFOM, i.e., 4V${_{\text {B}}} {^{{2}}}$ /Ron,sp) of 12.1 GW/cm2, a Ron,sp of ${\mathrm {4.9~\text {m}\Omega }} \cdot $ cm2 and a BV of 3.85 kV, representing the best performance among reported SiC floating junction (FJ) devices.
期刊介绍:
IEEE Electron Device Letters publishes original and significant contributions relating to the theory, modeling, design, performance and reliability of electron and ion integrated circuit devices and interconnects, involving insulators, metals, organic materials, micro-plasmas, semiconductors, quantum-effect structures, vacuum devices, and emerging materials with applications in bioelectronics, biomedical electronics, computation, communications, displays, microelectromechanics, imaging, micro-actuators, nanoelectronics, optoelectronics, photovoltaics, power ICs and micro-sensors.