Self-Aligned Staggered Amorphous-Indium-Gallium-Zinc-Oxide Thin-Film Transistors With Ultra-Low Contact Resistance for High-Speed Circuits Application

IF 2 3区工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Journal of the Electron Devices Society Pub Date : 2025-02-18 DOI:10.1109/JEDS.2025.3543212

Chuanke Chen;Xinlv Duan;Congyan Lu;Xichen Chuai;Wanming Wu;Chunyu Zhang;Chen Gu;Guanhua Yang;Nianduan Lu;Di Geng;Ling Li

引用次数: 0

Abstract

A self-aligned (SA) staggered structure for amorphous-In-Ga-Zn-O (a-IGZO) thin-film transistors (TFTs) is proposed. The bottom contact between n+-IGZO and source/drain (S/D) enables larger contact area and shorter current-transmission distance, thus reducing the contact resistance. The non-overlap structure helps to eliminate the overlap-induced parasitic capacitance, thereby improving the device operating speed. The fabricated SA staggered a-IGZO TFTs exhibit good performance, including channel-width-normalized contact resistance (RCW) as low as 1.53

$\Omega \cdot \mathrm{~cm}$

and transit frequency (fT) as high as 1.4 GHz, which are quite competitive in the field of high-speed a-IGZO TFTs.

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来源期刊

IEEE Journal of the Electron Devices Society Biochemistry, Genetics and Molecular Biology-Biotechnology

CiteScore

5.20

自引率

4.30%

发文量

124

审稿时长

9 weeks

期刊介绍： The IEEE Journal of the Electron Devices Society (J-EDS) is an open-access, fully electronic scientific journal publishing papers ranging from fundamental to applied research that are scientifically rigorous and relevant to electron devices. The J-EDS publishes original and significant contributions relating to the theory, modelling, design, performance, and reliability of electron and ion integrated circuit devices and interconnects, involving insulators, metals, organic materials, micro-plasmas, semiconductors, quantum-effect structures, vacuum devices, and emerging materials with applications in bioelectronics, biomedical electronics, computation, communications, displays, microelectromechanics, imaging, micro-actuators, nanodevices, optoelectronics, photovoltaics, power IC''s, and micro-sensors. Tutorial and review papers on these subjects are, also, published. And, occasionally special issues with a collection of papers on particular areas in more depth and breadth are, also, published. J-EDS publishes all papers that are judged to be technically valid and original.