Parallel direct laser writing method based on optical fiber array

IF 4.6 2区物理与天体物理 Q1 OPTICS

Optics and Laser Technology Pub Date : 2025-03-04 DOI:10.1016/j.optlastec.2025.112738

Junyi Lu , Liang Xu , Mengdi Luo , Jisen Wen , Yinxu Bian , Zhenyao Yang , Dazhao Zhu , Xiaoming Shen , Chenliang Ding , Cuifang Kuang , Xu Liu

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引用次数: 0

Abstract

Direct laser writing (DLW) technology has been widely used in various fields, and parallelization via multi-foci generation has been an effective approach to improve manufacturing efficiency. However, the present technologies make it difficult to achieve high throughput while maintaining high precision and consistency. This paper proposes a high-throughput nano-scale DLW technology based on an optical fiber array, which has the capability for parallel writing through multiple channels that can be independently controlled and has validated the possibility of 60-channel writing. The beam-combining technology based on fibers allows the error range between channels to be reduced to within 20 nm. By modulating the energy of the parallel channels, the technology achieves sub-40 nm precision while increasing throughput. This technology supports the writing of large-area structures and non-periodic patterns and is expected to solve the problem of parallel high-throughput writing with high precision.

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来源期刊

Optics and Laser Technology 物理-光学

CiteScore

8.50

自引率

10.00%

发文量

1060

审稿时长

3.4 months

期刊介绍： Optics & Laser Technology aims to provide a vehicle for the publication of a broad range of high quality research and review papers in those fields of scientific and engineering research appertaining to the development and application of the technology of optics and lasers. Papers describing original work in these areas are submitted to rigorous refereeing prior to acceptance for publication. The scope of Optics & Laser Technology encompasses, but is not restricted to, the following areas: •development in all types of lasers •developments in optoelectronic devices and photonics •developments in new photonics and optical concepts •developments in conventional optics, optical instruments and components •techniques of optical metrology, including interferometry and optical fibre sensors •LIDAR and other non-contact optical measurement techniques, including optical methods in heat and fluid flow •applications of lasers to materials processing, optical NDT display (including holography) and optical communication •research and development in the field of laser safety including studies of hazards resulting from the applications of lasers (laser safety, hazards of laser fume) •developments in optical computing and optical information processing •developments in new optical materials •developments in new optical characterization methods and techniques •developments in quantum optics •developments in light assisted micro and nanofabrication methods and techniques •developments in nanophotonics and biophotonics •developments in imaging processing and systems