The reduction of laser-damage on the rear surface of the N-type TOPCon solar cells with electroplating electrodes

IF 4.2 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC
Zhipeng Liu , Meixian Huang , Jianbo Shao , Chengming Song , Yusen Qin , Song Zhang , Qiqi Wang , Meilin Peng , Meiling Zhang , Guilin Liu , Xi Xi , Jingjia Ji
{"title":"The reduction of laser-damage on the rear surface of the N-type TOPCon solar cells with electroplating electrodes","authors":"Zhipeng Liu ,&nbsp;Meixian Huang ,&nbsp;Jianbo Shao ,&nbsp;Chengming Song ,&nbsp;Yusen Qin ,&nbsp;Song Zhang ,&nbsp;Qiqi Wang ,&nbsp;Meilin Peng ,&nbsp;Meiling Zhang ,&nbsp;Guilin Liu ,&nbsp;Xi Xi ,&nbsp;Jingjia Ji","doi":"10.1016/j.mssp.2025.109433","DOIUrl":null,"url":null,"abstract":"<div><div>The shortcomings of traditional screen-printed technology in PV industry have rendered it inadequate for the demands of high power conversion efficiency solar cell design, including the low contact performance and the high shading area. Combinating laser ablation pretreatment and Ni/Cu plating can circumvent these issues. However, laser-induced damage significantly influences the further enhancement of power conversion efficiency of the solar cells with electroplating electrodes. In this paper, a simplified physical model of laser ablation on the rear surface dielectric layer for N-type tunnel oxide passivated contacts(TOPCon) solar cells was presented. According to model, the approximate calculation of the laser ablation power was between 0.2 W and 1.6 W, when a 355 nm ps Gaussian pulsed laser was employed on the rear surface of N-type TOPCon solar cells. Subsequently, the optimal laser ablation process parameters for the electroplating process on the rear surface of the wafer were identified through experiments. By modifying the laser ablation process, as far as possible to reduce the damage to the polycrystalline silicon passivation layer caused by the laser on the rear surface of the TOPCon solar cells. Following the modification of the laser ablation procedure, the laser-induced damage was also rectified through high-temperature annealing. Ultimately, a photoelectric conversion efficiency of 24.36 % was attained in the N-type electroplating TOPCon solar cells, representing an enhancement of 0.86%<sub>abs</sub> in comparison to that of the TOPCon solar cells with electrodes fabricated by screen-printed on the rear surface.</div></div>","PeriodicalId":18240,"journal":{"name":"Materials Science in Semiconductor Processing","volume":"192 ","pages":"Article 109433"},"PeriodicalIF":4.2000,"publicationDate":"2025-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Materials Science in Semiconductor Processing","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S1369800125001702","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0

Abstract

The shortcomings of traditional screen-printed technology in PV industry have rendered it inadequate for the demands of high power conversion efficiency solar cell design, including the low contact performance and the high shading area. Combinating laser ablation pretreatment and Ni/Cu plating can circumvent these issues. However, laser-induced damage significantly influences the further enhancement of power conversion efficiency of the solar cells with electroplating electrodes. In this paper, a simplified physical model of laser ablation on the rear surface dielectric layer for N-type tunnel oxide passivated contacts(TOPCon) solar cells was presented. According to model, the approximate calculation of the laser ablation power was between 0.2 W and 1.6 W, when a 355 nm ps Gaussian pulsed laser was employed on the rear surface of N-type TOPCon solar cells. Subsequently, the optimal laser ablation process parameters for the electroplating process on the rear surface of the wafer were identified through experiments. By modifying the laser ablation process, as far as possible to reduce the damage to the polycrystalline silicon passivation layer caused by the laser on the rear surface of the TOPCon solar cells. Following the modification of the laser ablation procedure, the laser-induced damage was also rectified through high-temperature annealing. Ultimately, a photoelectric conversion efficiency of 24.36 % was attained in the N-type electroplating TOPCon solar cells, representing an enhancement of 0.86%abs in comparison to that of the TOPCon solar cells with electrodes fabricated by screen-printed on the rear surface.
求助全文
约1分钟内获得全文 求助全文
来源期刊
Materials Science in Semiconductor Processing
Materials Science in Semiconductor Processing 工程技术-材料科学:综合
CiteScore
8.00
自引率
4.90%
发文量
780
审稿时长
42 days
期刊介绍: Materials Science in Semiconductor Processing provides a unique forum for the discussion of novel processing, applications and theoretical studies of functional materials and devices for (opto)electronics, sensors, detectors, biotechnology and green energy. Each issue will aim to provide a snapshot of current insights, new achievements, breakthroughs and future trends in such diverse fields as microelectronics, energy conversion and storage, communications, biotechnology, (photo)catalysis, nano- and thin-film technology, hybrid and composite materials, chemical processing, vapor-phase deposition, device fabrication, and modelling, which are the backbone of advanced semiconductor processing and applications. Coverage will include: advanced lithography for submicron devices; etching and related topics; ion implantation; damage evolution and related issues; plasma and thermal CVD; rapid thermal processing; advanced metallization and interconnect schemes; thin dielectric layers, oxidation; sol-gel processing; chemical bath and (electro)chemical deposition; compound semiconductor processing; new non-oxide materials and their applications; (macro)molecular and hybrid materials; molecular dynamics, ab-initio methods, Monte Carlo, etc.; new materials and processes for discrete and integrated circuits; magnetic materials and spintronics; heterostructures and quantum devices; engineering of the electrical and optical properties of semiconductors; crystal growth mechanisms; reliability, defect density, intrinsic impurities and defects.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信