{"title":"High RF Performance E-Mode GaN-on-Si HEMTs With Pₒᵤₜ of 5.32 W/mm Using High-Quality Ultrathin Buffer","authors":"Jiale Du;Bin Hou;Ling Yang;Yachao Zhang;Qing Zhu;Meng Zhang;Mei Wu;Sen Huang;Fang Song;Hao Lu;Xuerui Niu;Mao Jia;Qingyuan Chang;Qian Yu;Borui Xue;Wen Zhao;Xiaohua Ma;Yue Hao","doi":"10.1109/LED.2025.3526503","DOIUrl":null,"url":null,"abstract":"In this letter, we report a high-performance enhancement-mode GaN HEMT fabricated on high-quality ultrathin buffer, which achieved by a two-step-graded (TSG) transition structure on high-resistivity (HR) silicon substrate. Owing to rapid dislocation annihilation of TSG transition structure, the ultrathin buffer exhibits a low total dislocation density (TDD) of <inline-formula> <tex-math>${1}.{7}\\times {10} ^{{9}}$ </tex-math></inline-formula> cm<inline-formula> <tex-math>$^{-{2}}$ </tex-math></inline-formula>, which could make a contribution to the improvement of current and RF power performance. As a result, an E-mode GaN HEMT fabricated on this structure presents a maximum drain current of 620 mA/mm, a threshold voltage (<inline-formula> <tex-math>${V}_{\\text {th}}\\text {)}$ </tex-math></inline-formula> of 0.7 V, and a transconductance of 360 mS/mm. Furthermore, load-pull measurements yield a maximum output power density (<inline-formula> <tex-math>${P}_{\\text {out}}\\text {)}$ </tex-math></inline-formula> of 5.32 W/mm at 3.6 GHz and <inline-formula> <tex-math>${V}_{\\text {DS}}=35$ </tex-math></inline-formula>V in pulse mode, which represents the top level for E-mode GaN-on-Si devices reported to date. The high-quality GaN epitaxy and splendid E-mode HEMT shown in this work reveal great potential for GaN-on-Si RF applications.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"46 3","pages":"349-352"},"PeriodicalIF":4.1000,"publicationDate":"2025-01-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Electron Device Letters","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/10829674/","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
In this letter, we report a high-performance enhancement-mode GaN HEMT fabricated on high-quality ultrathin buffer, which achieved by a two-step-graded (TSG) transition structure on high-resistivity (HR) silicon substrate. Owing to rapid dislocation annihilation of TSG transition structure, the ultrathin buffer exhibits a low total dislocation density (TDD) of ${1}.{7}\times {10} ^{{9}}$ cm$^{-{2}}$ , which could make a contribution to the improvement of current and RF power performance. As a result, an E-mode GaN HEMT fabricated on this structure presents a maximum drain current of 620 mA/mm, a threshold voltage (${V}_{\text {th}}\text {)}$ of 0.7 V, and a transconductance of 360 mS/mm. Furthermore, load-pull measurements yield a maximum output power density (${P}_{\text {out}}\text {)}$ of 5.32 W/mm at 3.6 GHz and ${V}_{\text {DS}}=35$ V in pulse mode, which represents the top level for E-mode GaN-on-Si devices reported to date. The high-quality GaN epitaxy and splendid E-mode HEMT shown in this work reveal great potential for GaN-on-Si RF applications.
期刊介绍:
IEEE Electron Device Letters publishes original and significant contributions relating to the theory, modeling, design, performance and reliability of electron and ion integrated circuit devices and interconnects, involving insulators, metals, organic materials, micro-plasmas, semiconductors, quantum-effect structures, vacuum devices, and emerging materials with applications in bioelectronics, biomedical electronics, computation, communications, displays, microelectromechanics, imaging, micro-actuators, nanoelectronics, optoelectronics, photovoltaics, power ICs and micro-sensors.