Corrigendum to “A structure zone diagram including plasma-based deposition and ion etching” [Thin Solid Films 518 (2010) 4087–4090]

{"title":"Corrigendum to “A structure zone diagram including plasma-based deposition and ion etching” [Thin Solid Films 518 (2010) 4087–4090]","authors":"André Anders","doi":"10.1016/j.tsf.2024.140574","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":23182,"journal":{"name":"Thin Solid Films","volume":"808 ","pages":"Article 140574"},"PeriodicalIF":2.0000,"publicationDate":"2024-11-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Thin Solid Films","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0040609024003754","RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"MATERIALS SCIENCE, COATINGS & FILMS","Score":null,"Total":0}