Effect of UV/ozone treatment in chemical cleaning procedure on photoemission performance of GaAs and GaN photocathodes

IF 5.2 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC
Jian Liu , Yijun Zhang , Cheng Feng , Shuai Cheng , Rongsheng Zhu
{"title":"Effect of UV/ozone treatment in chemical cleaning procedure on photoemission performance of GaAs and GaN photocathodes","authors":"Jian Liu ,&nbsp;Yijun Zhang ,&nbsp;Cheng Feng ,&nbsp;Shuai Cheng ,&nbsp;Rongsheng Zhu","doi":"10.1016/j.mssp.2025.109294","DOIUrl":null,"url":null,"abstract":"<div><div>To obtain a cleaner surface and enhance the photoemission performance of III-V photocathode, a comparative study of cleaning procedure using acidic solutions and UV/Ozone treatment, respectively, is investigated in GaAs and GaN photocathodes. The subsequent heat treatment and activation are carried out and the quantum efficiencies of GaAs and GaN photocathodes taking the different cleaning methods are compared. The results show that the quantum efficiency of GaN photocathodes with UV/Ozone treatment can be higher than using acidic solutions, while for GaAs photocathodes, the results are completely different. By using X-ray photoelectron spectroscopy analysis, we summarize the characteristics of these treatments, trying to find the function mechanism. The XPS spectra show that UV/Ozone treatment can effectively restrain carbon contaminations of these photocathodes. But the strong oxidizing properties of UV/Ozone treatment on GaAs surface leads to the generation of more oxides, and even the high-temperature heating cannot remove them. Conversely, no additional oxidation of GaN by UV/Ozone treatment is observed, and the reduced carbon contamination results in an increase of quantum efficiency of the GaN photocathode.</div></div>","PeriodicalId":18240,"journal":{"name":"Materials Science in Semiconductor Processing","volume":"189 ","pages":"Article 109294"},"PeriodicalIF":5.2000,"publicationDate":"2025-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Materials Science in Semiconductor Processing","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S1369800125000319","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"2025/1/17 0:00:00","PubModel":"Epub","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0

Abstract

To obtain a cleaner surface and enhance the photoemission performance of III-V photocathode, a comparative study of cleaning procedure using acidic solutions and UV/Ozone treatment, respectively, is investigated in GaAs and GaN photocathodes. The subsequent heat treatment and activation are carried out and the quantum efficiencies of GaAs and GaN photocathodes taking the different cleaning methods are compared. The results show that the quantum efficiency of GaN photocathodes with UV/Ozone treatment can be higher than using acidic solutions, while for GaAs photocathodes, the results are completely different. By using X-ray photoelectron spectroscopy analysis, we summarize the characteristics of these treatments, trying to find the function mechanism. The XPS spectra show that UV/Ozone treatment can effectively restrain carbon contaminations of these photocathodes. But the strong oxidizing properties of UV/Ozone treatment on GaAs surface leads to the generation of more oxides, and even the high-temperature heating cannot remove them. Conversely, no additional oxidation of GaN by UV/Ozone treatment is observed, and the reduced carbon contamination results in an increase of quantum efficiency of the GaN photocathode.
化学清洗过程中UV/臭氧处理对GaAs和GaN光电阴极光电性能的影响
为了获得更清洁的表面和提高III-V型光电阴极的光电性能,分别研究了酸性溶液和UV/臭氧处理对GaAs和GaN光电阴极的清洗工艺。进行了后续的热处理和活化,比较了不同清洗方法下GaAs和GaN光电阴极的量子效率。结果表明,紫外/臭氧处理的GaN光电阴极的量子效率高于酸性溶液,而GaAs光电阴极的量子效率则完全不同。通过x射线光电子能谱分析,我们总结了这些处理的特点,试图找出其作用机理。XPS光谱表明,紫外/臭氧处理能有效抑制碳污染。但由于UV/臭氧处理在GaAs表面的强氧化性,导致生成更多的氧化物,即使高温加热也无法去除。相反,通过UV/臭氧处理没有观察到GaN的额外氧化,并且减少的碳污染导致GaN光电阴极的量子效率增加。
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来源期刊
Materials Science in Semiconductor Processing
Materials Science in Semiconductor Processing 工程技术-材料科学:综合
CiteScore
8.00
自引率
4.90%
发文量
780
审稿时长
42 days
期刊介绍: Materials Science in Semiconductor Processing provides a unique forum for the discussion of novel processing, applications and theoretical studies of functional materials and devices for (opto)electronics, sensors, detectors, biotechnology and green energy. Each issue will aim to provide a snapshot of current insights, new achievements, breakthroughs and future trends in such diverse fields as microelectronics, energy conversion and storage, communications, biotechnology, (photo)catalysis, nano- and thin-film technology, hybrid and composite materials, chemical processing, vapor-phase deposition, device fabrication, and modelling, which are the backbone of advanced semiconductor processing and applications. Coverage will include: advanced lithography for submicron devices; etching and related topics; ion implantation; damage evolution and related issues; plasma and thermal CVD; rapid thermal processing; advanced metallization and interconnect schemes; thin dielectric layers, oxidation; sol-gel processing; chemical bath and (electro)chemical deposition; compound semiconductor processing; new non-oxide materials and their applications; (macro)molecular and hybrid materials; molecular dynamics, ab-initio methods, Monte Carlo, etc.; new materials and processes for discrete and integrated circuits; magnetic materials and spintronics; heterostructures and quantum devices; engineering of the electrical and optical properties of semiconductors; crystal growth mechanisms; reliability, defect density, intrinsic impurities and defects.
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