{"title":"Photochemical Synthesis of Ag Nanoparticles Decorated on ZnO Nanorods for MSM-Structured Humidity Sensors","authors":"Yu-Jhih Chu;Sheng-Joue Young;Yi-Hsing Liu;Shoou-Jinn Chang","doi":"10.1109/TED.2024.3519058","DOIUrl":null,"url":null,"abstract":"In this article, we describe the efficient humidity sensors (HR) designed via pure ZnO nanorods (NRDs) and silver (Ag) nanoparticles (NPs)-decorated ZnO NRD grown on the surface of glass substrate by the hydrothermal method during 6 h of the environment at <inline-formula> <tex-math>$90~^{\\circ }$ </tex-math></inline-formula>C. The physical characteristics of the ZnO NRD and Ag-ZnO NRD were analyzed via field-emission scanning electron microscopy, X-ray diffraction analysis, X-ray photoelectron spectroscopy, and high-resolution transmission electron microscopy. The optical properties were analyzed via photoluminescence (PL). In humidity (RH) measurement, the Ag-ZnO NRD displayed high photo-to-dark current ratios (PDCRs), low rise (<inline-formula> <tex-math>${T} _{\\text {r}}$ </tex-math></inline-formula>), and fall times (<inline-formula> <tex-math>${T} _{\\text {f}}$ </tex-math></inline-formula>) of 37.5, 9.6 s, and 17.3 s at RH 80% environment. The Ag-ZnO NRD HR exhibited greater results than ZnO HR. The above results indicate that the ZnO NRD decorated with Ag NPs can effectively improve the sensing performance of humidity sensor.","PeriodicalId":13092,"journal":{"name":"IEEE Transactions on Electron Devices","volume":"72 2","pages":"830-835"},"PeriodicalIF":2.9000,"publicationDate":"2025-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Transactions on Electron Devices","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/10819628/","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
In this article, we describe the efficient humidity sensors (HR) designed via pure ZnO nanorods (NRDs) and silver (Ag) nanoparticles (NPs)-decorated ZnO NRD grown on the surface of glass substrate by the hydrothermal method during 6 h of the environment at $90~^{\circ }$ C. The physical characteristics of the ZnO NRD and Ag-ZnO NRD were analyzed via field-emission scanning electron microscopy, X-ray diffraction analysis, X-ray photoelectron spectroscopy, and high-resolution transmission electron microscopy. The optical properties were analyzed via photoluminescence (PL). In humidity (RH) measurement, the Ag-ZnO NRD displayed high photo-to-dark current ratios (PDCRs), low rise (${T} _{\text {r}}$ ), and fall times (${T} _{\text {f}}$ ) of 37.5, 9.6 s, and 17.3 s at RH 80% environment. The Ag-ZnO NRD HR exhibited greater results than ZnO HR. The above results indicate that the ZnO NRD decorated with Ag NPs can effectively improve the sensing performance of humidity sensor.
期刊介绍:
IEEE Transactions on Electron Devices publishes original and significant contributions relating to the theory, modeling, design, performance and reliability of electron and ion integrated circuit devices and interconnects, involving insulators, metals, organic materials, micro-plasmas, semiconductors, quantum-effect structures, vacuum devices, and emerging materials with applications in bioelectronics, biomedical electronics, computation, communications, displays, microelectromechanics, imaging, micro-actuators, nanoelectronics, optoelectronics, photovoltaics, power ICs and micro-sensors. Tutorial and review papers on these subjects are also published and occasional special issues appear to present a collection of papers which treat particular areas in more depth and breadth.